SWITCH AND METHOD FOR PRODUCING THE SAME

• US 20040112729A1
• Filed: 12/12/2002
• Published: 06/17/2004
• Est. Priority Date: 12/12/2002
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Granted Patent: US 6,787,719 B2
• Time in Patent Office: Days
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0073 Solutions for avoiding the use of expensive silicon technologies in micromechanical switches
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 29/28 with level of surface of contact liquid displaced by fluid pressure

Abstract

A switch and method for producing the same. In one embodiment, the switch is produced by depositing a liquid switching element on a substrate, the volume of the liquid switching element being more than needed to fulfill a switching function. A channel plate is moved toward the substrate, the channel plate having a main channel with at least one reservoir fluidically connected thereto, an excess portion of the liquid switching element flowing into the least one reservoir. The channel plate is closed against the substrate.

Claims

1. A method for assembling a switch, comprising:

depositing a liquid switching element on a substrate;

positioning a channel plate adjacent the substrate; and

moving the channel plate toward the substrate, wherein an excess portion of the liquid switching element flows from a main channel in the channel plate into a reservoir fluidically connected to the main channel.

2. The method of claim 1, further comprising locking a gas volume in the reservoir.

3. The method of claim 1, wherein depositing the liquid switching element is as a plurality of separate volumes.

4. The method of claim 1, wherein the liquid switching element dissolves at least one bridge between adjacent contact pads on the substrate.

5. The method of claim 1, wherein the liquid switching element dissolves at least one bridge between adjacent seal belts on the channel plate.

6. The method of claim 1, further comprising pausing for the liquid switching element to equilibrate.

7. The method of claim 1, further comprising closing the channel plate against the substrate.

8. The method of claim 1, wherein the liquid switching element wets to at least one contact pad on the substrate and at least one seal belt on the channel plate when the channel plate is moved toward the substrate.

9. A switch produced by:

depositing a liquid switching element on a substrate, the volume of said liquid switching element being more than needed to fulfill a switching function;

moving a channel plate toward said substrate, said channel plate having a main channel with at least one reservoir fluidically connected thereto, an excess portion of said liquid switching element flowing into the least one reservoir; and

closing said channel plate against said substrate.

10. The switch of claim 9, wherein said liquid switching element is a liquid metal.

11. The switch of claim 9, further comprising locking a gas volume in the at least one reservoir.

12. The switch of claim 9, wherein said liquid switching element is deposited on a plurality of contact pads on said substrate, said liquid switching element connecting at least two of said plurality of contact pads to one another.

13. The switch of claim 9, further comprising dissolving a bridge between adjacent contact pads on said substrate.

14. The switch of claim 9, further comprising dissolving a bridge between adjacent seal belts on said channel plate.

15. The switch of claim 9, wherein moving said channel plate toward said substrate is paused to allow said liquid switching element to equilibrate.

16. The switch of claim 9, wherein moving said channel plate toward said substrate is slowed to allow said liquid switching element to equilibrate.

17. The switch of claim 9, wherein said liquid switching element wets to at least one seal belt on said channel plate when said channel plate is moved toward said substrate.

18. A switch, comprising:

a channel plate having a main channel formed therein and at least one reservoir fluidically connected to the main channel;

a substrate having at least one contact pad;

a liquid switching element deposited on said at least one contact pad, a portion of said liquid switching element flowing from the main channel into the at least one reservoir when said channel plate is assembled to said substrate.

19. The switch of claim 18, further comprising a gas volume in said at least one reservoir.

20. The switch of claim 18, wherein said at least one reservoir is tapered outward from the main channel.

21. The switch of claim 18, further comprising a bridge extending between adjacent contact pads on said substrate, said bridge receiving said liquid switching element between said adjacent contact pads.

22. The switch of claim 21, wherein said bridge is dissolvable.

23. The switch of claim 18, further comprising:

a plurality of seal belts on said channel plate; and

a bridge extending between at least two adjacent seal belts on said channel plate, wherein said liquid switching element wets to said plurality of seal belts and said bridge.

24. The switch of claim 23, wherein said bridge is dissolvable.

25. The switch of claim 23, wherein at least one of said plurality of seal belts extends from the main channel into the at least one reservoir.

26. The switch of claim 18, wherein said channel plate further comprises a drive chamber connected to the main channel.

27. The switch of claim 18, further comprising a first reservoir on one end of the main channel and a second reservoir on another end of the main channel.

28. The switch of claim 18, wherein said liquid switching element is a liquid metal.