Method for surface treatment of processed copper workpiece
First Claim
1. A method for surface treatment of a processed copper article, which comprises treating a surface of a processed copper article by using an electrolyzed acidic water.
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Abstract
The present invention provides a soft etching technique for degreasing and removal of oxide layers on the surface of a processed copper article and for improvement of adhesion with a resist film, and a technique by which the waste water treatment accompanying the soft etching can be made non-polluting. Namely, the surface of the processed copper article is treated with at first an electrolyzed alkaline water, then an electrolyzed acidic water and further an electrolyzed alkaline water, sequentially, and then subjected to washing with water and a drying treatment, and the waste water by the treatment with the electrolyzed acidic water and the waste water by the treatment with the electrolyzed alkaline water are mixed and neutralized, and from the thus obtained neutralized water, copper ions are recovered.
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16 Claims
- 1. A method for surface treatment of a processed copper article, which comprises treating a surface of a processed copper article by using an electrolyzed acidic water.
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