Planarization composition and method of patterning a substrate using the same
First Claim
1. A composition polymerizable in response to radiation being incident thereupon, said composition comprising:
- a non-silicon-containing acrylate component; and
an initiator component combined with said non-silicon-containing acrylate to provide a viscosity no greater than 5 cps, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said non-silicon containing acrylate component to polymerize and cross-link.
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Abstract
The present invention includes a composition and a method for forming a pattern on a substrate with the composition by forming a cross-linked polymer from the composition upon exposing the same to radiation. To that end, in one embodiment of the present invention the composition includes a non-silicon-containing acrylate component, and an initiator component combined with said non-silicon-containing acrylate to provide a viscosity no greater than 5 cps. The initiator component is responsive to radiation to initiate a free radical reaction and cause the non-silicon containing acrylate component to polymerize and cross-link. One embodiment of the non-silicon-containing acrylate component includes ethylene glycol diacrylate. The method includes depositing the composition to function as a planarization layer. Thereafter, a layer of polymerizable material into which a pattern is to be recorded is deposited.
144 Citations
12 Claims
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1. A composition polymerizable in response to radiation being incident thereupon, said composition comprising:
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a non-silicon-containing acrylate component; and
an initiator component combined with said non-silicon-containing acrylate to provide a viscosity no greater than 5 cps, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said non-silicon containing acrylate component to polymerize and cross-link. - View Dependent Claims (2)
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3. A method of patterning a layer on a substrate, said method comprising:
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forming a layer of polymerizable material on said substrate;
forming a planarization layer on said substrate, positioned between said substrate and said layer of polymerizable material, from a composition of a non-silicon-containing acrylate component and an initiator component combined with said non-silicon-containing acrylate to provide a viscosity no greater than 5 cps, and swelling to no greater extent than to have greater than 5% of said layer of polymerizable material penetrate said planarization layer;
contacting said layer of polymerizable material with a surface of a mold to conform said layer of polymerizable material to said surface;
polymerizing said planarization layer and said layer of polymerizable material by impinging actinic radiation thereupon, to form polymerized layers. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification