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Planarization composition and method of patterning a substrate using the same

  • US 20040112862A1
  • Filed: 12/12/2002
  • Published: 06/17/2004
  • Est. Priority Date: 12/12/2002
  • Status: Abandoned Application
First Claim
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1. A composition polymerizable in response to radiation being incident thereupon, said composition comprising:

  • a non-silicon-containing acrylate component; and

    an initiator component combined with said non-silicon-containing acrylate to provide a viscosity no greater than 5 cps, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said non-silicon containing acrylate component to polymerize and cross-link.

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