Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment

• US 20040112885A1
• Filed: 01/05/2004
• Published: 06/17/2004
• Est. Priority Date: 12/28/2000
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Shigeoka, Takashi, Sakuma, Takeshi
• Granted Patent: US 6,876,816 B2
• Time in Patent Office: Days
• US Class Current: 219/388
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

A heat treatment apparatus achieves a uniform and rapid temperature rise of an object to be processed. A plurality of double-end lamps heat the object to be processed so as to apply a heat treatment process to the object. A plurality of reflectors reflect radiation heat of the double-end lamps toward the object to be processed. Each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part, or each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.

Claims

1. A heating device for heating an object to be processed, comprising:

a plurality of double-end lamps for heating the object to be processed so as to apply a heat treatment process to the object;

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part.

2. The heating device as claimed in claim 1, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the entire object to be processed is heated uniformly.

3. A heating device for heating to an object to be processed, comprising:

a plurality of double-end lamps for heating the object to be processed so as to apply a heat treatment process to the object; and

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.

4. The heating device as claimed in claim 3, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

5. A heat treatment apparatus for applying a heat treatment process to an object to be processed, comprising:

a plurality of double-end lamps for heating the object to be processed so as to apply the heat treatment process to the object;

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part.

6. The heat treatment apparatus as claimed in claim 5, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

7. A heat treatment apparatus for applying a heat treatment process to an object to be processed, comprising:

a plurality of double-end lamps for heating the object to be processed so as to apply the heat treatment process to the object; and

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.

8. The heat treatment apparatus as claimed in claim 7, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

9. A heat treatment apparatus comprising:

a process chamber for accommodating an object to be processed so as to apply a heat treatment process to the object; and

a heating unit heating the object to be processed by irradiating a radiation light onto the object to be processed, the heating unit comprises;

a plurality of double-end-lamps for heating the object to be processed so as to apply the heat treatment process to the object; and

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in at least two stages.

10. The heat treatment apparatus as claimed in claim 9, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

15. The heat treatment apparatus as claimed in one of claims 5-14, further comprising a quartz window located between the object to be processed and the double-end lamps, wherein the quartz window comprises a quartz plate and a lens member provided on the quartz plate, the lens member reinforcing the quartz plate and condensing a light from the heating unit toward the object to be processed.

16. The heat treatment apparatus as claimed in claim 15, wherein the lens member includes a plurality of lens elements corresponding to the double-end lamps.

17. The heat treatment apparatus as claimed in claim 15, wherein a longitudinal direction of the lens member is parallel to the longitudinal direction of the light-emitting part.

18. The heat treatment apparatus as claimed in claim 15, wherein the lens member is provided to a first surface of the quartz plate facing the double-end lamps and also to a second surface of the quartz plate opposite to the first surface.

19. The heat treatment apparatus as claimed in claim 15, wherein a reinforcing member is provided to the quartz plate so as to reinforce the quartz member.

20. The heat treatment apparatus as claimed in claim 19, wherein the reinforcing member is made of aluminum.

21. The heat treatment apparatus as claimed in claim 19, further comprising a cooling mechanism which cools the reinforcing member.

22. The heat treatment apparatus as claimed in claim 19, wherein the lens member is provided to a first surface of the quartz plate and the reinforcing member is provided to a second surface of the quartz plate opposite to the first surface.

23. The heat treatment apparatus as claimed in claim 19, wherein a plurality of reinforcing members are provided, and a quartz waveguiding member is provided between adjacent waveguiding members so as to guide a light exiting the lens member and the quartz plate to the object to be processed.

24. The heat treatment apparatus as claimed in one of claims 5-14, further comprising:

a quartz window located between the object to be processed and the double-end lamps; and

a reinforcing member provided to the quartz window so as to reinforce the quartz window.

25. The heat treatment apparatus as claimed in one of claims 5-14 further comprising an exhausting device connected to the process chamber so as to maintain the process chamber in a depressurized state.

11. A heat treatment apparatus comprising:

a process chamber for accommodating an object to be processed so as to apply a heat treatment process to the object;

a support member supporting the object to be processed within the process chamber, the support member contacts a part of the object to be processed;

a heating unit heating the object to be processed by irradiating a radiation light onto the object to be processed;

a temperature measuring device measuring a temperature of the object to be processed; and

a control unit connected to the heating unit and the temperature measuring device,

wherein the heating unit comprises;

a plurality of double-end lamps for heating the object to be processed; and

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and at least two double-end lamps among the plurality of double-end lamps are arranged along a longitudinal direction of the light-emitting part; and

the control unit controls outputs of the double-end lamps based on a result of measurement of the temperature measuring device and an illuminance distribution characteristic produced by arbitrarily combining illuminance distributions of the double-end lamps so as to raise a temperature of the entire object uniformly.

12. The heat treatment apparatus as claimed in claim 11, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

13. A heat treatment apparatus comprising:

a process chamber for accommodating an object to be processed so as to apply a heat treatment process to the object;

a support member supporting the object to be processed within the process chamber, the support member contacts a part of the object to be processed;

a heating unit heating the object to be processed by irradiating a radiation light onto the object to be processed;

a temperature measuring device measuring a temperature of the object to be processed; and

a control unit connected to the heating unit and the temperature measuring device,

wherein the heating unit comprises;

a plurality of double-end lamps for heating the object to be processed; and

a plurality of reflectors reflecting radiation heat of the double-end lamps toward the object to be processed,

wherein each of the double-end lamps includes a rectilinear light-emitting part and the plurality of double-end lamps are arranged so that the light-emitting parts are parallel to each other and positioned in two stages; and

the control unit controls outputs of the double-end lamps based on a result of measurement of the temperature measuring device and an illuminance distribution characteristic produced by arbitrarily combining illuminance distributions of the double-end lamps so as to raise a temperature of the entire object uniformly.

14. The heat treatment apparatus as claimed in claim 13, wherein the object to be processed and the double-end lamps are relatively rotatable to each other so that the object to be processed is heated uniformly.

26. A method for controlling heat treatment applied to an object to be processed, comprising the steps of:

producing a first illuminance distribution characteristic having a maximum at a connection part of the object contacting a support member, which supports the object to be processed, and a minimum on the object, the first illuminance distribution characteristic being produced by combining illuminance distribution characteristic of a plurality of double-end lamps included in a heating unit for heating the object to be processed;

heating the object by the heating unit;

detecting a temperature distribution of the object to be processed and the support member; and

controlling outputs of the double-end lamps corresponding to the first illuminance distribution characteristic based on a result of detection of the detecting step so as to achieve a uniform temperature rise of the object to be processed.

27. The method as claimed in claim 26, wherein the producing step produces the first illuminance distribution characteristic so that the minimum is equal to or less than 0.17 W/mm².

28. The method as claimed in claim 26, wherein the producing step further produces a second illuminance distribution characteristic having a maximum on the object to be processed and a minimum at a part of the object to be processed above the support member, and the controlling step controls the outputs of the double-end lamps corresponding to the second illuminance distribution characteristic when a temperature of the connecting part of the object is different from a temperature of other parts of the object to be processed.

29. The method as claimed in claim 28, wherein the producing step further produces a third illuminance distribution characteristic having a maximum at the connection part of the object, and the controlling step controls the outputs of the double-end lamps corresponding to the third illuminance distribution characteristic.