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Infrared thermopile detector system for semiconductor process monitoring and control

  • US 20040113080A1
  • Filed: 12/09/2003
  • Published: 06/17/2004
  • Est. Priority Date: 05/08/2002
  • Status: Active Grant
First Claim
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1. A semiconductor process system adapted for processing of or with a material therein, said system comprising:

  • a sampling region for the material;

    an infrared radiation source constructed and arranged to transmit infrared radiation through the sampling region;

    a thermopile detector constructed and arranged to receive infrared radiation after the transmission thereof through the sampling region and to responsively generate an output signal correlative of said material; and

    process control means arranged to receive the output of the thermopile detector and to responsively control one or more process conditions in and/or affecting the semiconductor process system.

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