Spatial light modulator
First Claim
1. A deformable mirror element for modulating an incident beam of light, the element comprising:
- a substrate;
an elongate support extending along the substrate and projecting outwardly therefrom, and a ribbon member, attached to the elongate support along a longitudinal portion of the ribbon member and extending transversely from the elongate support; and
at least one slit formed transversely in the ribbon member, the slit for dividing the ribbon member into at least two reflective wing portions, the wing portions being elastically deformable towards the substrate on application of an actuation force.
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Accused Products
Abstract
A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into at least two individual wing portions. The wind portions extend laterally from the support and are capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of incident light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.
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Citations
28 Claims
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1. A deformable mirror element for modulating an incident beam of light, the element comprising:
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a substrate;
an elongate support extending along the substrate and projecting outwardly therefrom, and a ribbon member, attached to the elongate support along a longitudinal portion of the ribbon member and extending transversely from the elongate support; and
at least one slit formed transversely in the ribbon member, the slit for dividing the ribbon member into at least two reflective wing portions, the wing portions being elastically deformable towards the substrate on application of an actuation force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification