Objective with pupil obscuration
First Claim
1. An objective having a first field plane, an intermediate image plane, and a second field plane, the objective comprising a first partial objective having a first, convex mirror with a first central mirror aperture and a second, concave mirror with a second central mirror aperture;
- and a second partial objective having a third, concave mirror with a third central mirror aperture and a fourth, concave mirror with a fourth central mirror aperture;
wherein the first field plane and the intermediate image plane are conjugate planes relative to the first partial objective, and the intermediate image plane and the second field plane are conjugate planes relative to the second partial objective, wherein the first mirror has a first axial distance from the second mirror, the second mirror has a second axial distance from the intermediate image, and said first and second axial distances have a ratio between 0.95 and 1.05 relative to each other;
wherein the third mirror has a third axial distance ZM3-IM from the second field plane, and said third axial distance conforms to the relationship NA representing a numerical aperture NA in the second field plane, and DuM3 representing a diameter of the third mirror; and
wherein further the second field plane has a fourth axial distance from the first field plane, and the objective has a Petzval radius whose absolute value is greater than said fourth axial distance.
1 Assignment
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Accused Products
Abstract
An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IM between the third mirror and the second field plane conforms to the relationship
NA represents the numerical aperture NA in the second field plane, and DuM3 represents the diameter of the third mirror. The objective furthermore has a Petzval radius with an absolute value larger than the distance between the first and second field planes.
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Citations
43 Claims
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1. An objective having a first field plane, an intermediate image plane, and a second field plane, the objective comprising
a first partial objective having a first, convex mirror with a first central mirror aperture and a second, concave mirror with a second central mirror aperture; - and
a second partial objective having a third, concave mirror with a third central mirror aperture and a fourth, concave mirror with a fourth central mirror aperture;
wherein the first field plane and the intermediate image plane are conjugate planes relative to the first partial objective, and the intermediate image plane and the second field plane are conjugate planes relative to the second partial objective, wherein the first mirror has a first axial distance from the second mirror, the second mirror has a second axial distance from the intermediate image, and said first and second axial distances have a ratio between 0.95 and 1.05 relative to each other;
wherein the third mirror has a third axial distance ZM3-IM from the second field plane, and said third axial distance conforms to the relationshipNA representing a numerical aperture NA in the second field plane, and DuM3 representing a diameter of the third mirror; and
wherein further the second field plane has a fourth axial distance from the first field plane, and the objective has a Petzval radius whose absolute value is greater than said fourth axial distance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. An objective having a first field plane, an intermediate image plane and a second field plane, the objective comprising
a first partial objective having a first mirror with a first central mirror aperture and a second mirror with a second central mirror aperture; - and
a second partial objective having a third mirror with a third central mirror aperture and a fourth mirror with a fourth central mirror aperture;
wherein the first field plane and the intermediate image plane are conjugate planes relative to the first partial objective;
wherein the intermediate image plane and the second field plane are conjugate planes relative to the second partial objective;
wherein the objective has a first imaging ratio greater than 1;
1 between the first field plane and the intermediate image, and a second imaging ratio greater than 1;
1 between the intermediate image and the second field plane. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36)
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37. An objective having a first field plane, a first intermediate image plane, a second intermediate image plane, and a second field plane, the objective comprising
a first partial objective having a first mirror with a first central mirror aperture and a second mirror with a second central mirror aperture; -
a second partial objective having a third mirror with a third central mirror aperture and a fourth mirror with a fourth central mirror aperture; and
a third partial objective having a fifth mirror with a fifth central mirror aperture and a sixth mirror with a sixth central mirror aperture wherein the first field plane and the first intermediate image plane are conjugate planes relative to the first partial objective;
wherein the first intermediate image plane and the second intermediate image plane are conjugate planes relative to the second partial objective;
wherein the second intermediate image plane and the second field plane are conjugate planes relative to the third partial objective. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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Specification