Bonding pad of a semiconductor device and formation method thereof
First Claim
1. A bonding pad of a semiconductor device comprising:
- a barrier metal layer formed on a structure of a semiconductor substrate;
a metal wire layer formed on the barrier metal layer;
a passivation metal layer formed on the metal wire layer and removed partly to expose a portion of the upper surface of the metal wire layer;
an insulating layer which is formed on the passivation metal layer and has a contact hole exposing the metal wire layer via the portion that the passivation metal layer is removed; and
an adhesive metal layer formed on the inner surface of the contact hole.
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Accused Products
Abstract
The present invention relates to a bonding pad of a semiconductor device and a formation method thereof, and the object of the present invention is to prevent bonding defects by enlarging contact area between a bonding pad and a soldering material and to prevent moisture from penetrating into an oxide layer. The present invention provides a bonding pad of a semiconductor device comprising: a barrier metal layer formed on a structure of a semiconductor substrate; a metal wire layer formed on the barrier metal layer; a passivation metal layer formed on the metal wire layer and removed partly to expose a portion of the upper surface of the metal wire layer; an insulating layer which is formed on the passivation metal layer and has a contact hole exposing the metal wire layer via the portion that the passivation metal layer is removed; and an adhesive metal layer formed on the inner surface of the contact hole.
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Citations
8 Claims
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1. A bonding pad of a semiconductor device comprising:
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a barrier metal layer formed on a structure of a semiconductor substrate;
a metal wire layer formed on the barrier metal layer;
a passivation metal layer formed on the metal wire layer and removed partly to expose a portion of the upper surface of the metal wire layer;
an insulating layer which is formed on the passivation metal layer and has a contact hole exposing the metal wire layer via the portion that the passivation metal layer is removed; and
an adhesive metal layer formed on the inner surface of the contact hole. - View Dependent Claims (2, 3)
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4. A formation method of a bonding pad of a semiconductor device comprising:
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forming a barrier metal layer on a structure of a semiconductor substrate and depositing a metal wire layer and a passivation metal layer on the barrier metal layer;
forming an insulating layer and a passivation layer covering the barrier metal layer, the metal wire layer, and the passivation metal layer;
forming a contact hole by coating a photoresist layer on the passivation layer, exposing and developing the photoresist layer to remove a portion of the photoresist layer selectively on an area where a contact hole will be formed, and etching the passivation layer exposed by the removed portion of the photoresist layer and the insulating layer and passivation metal layer under the passivation layer;
removing the photoresist layer and forming a metal layer on entire surfaces of the passivation layer and the contact hole; and
forming an adhesive metal layer by dry-etching the metal layer to remove portions of the metal layer placed on the surfaces of the passivation layer and metal wire layer and thus remaining only the portion of the metal layer inside the contact hole. - View Dependent Claims (5, 6, 7, 8)
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Specification