Electrical capacitance-type diaphragm pressure sensor and a method of fabricating the same
First Claim
1. An electrical capacitance-type diaphragm pressure sensor comprising:
- a pressure-sensing member having a pressure receiving part formed from non-metallic strip diaphragms provided in opposing relation to each other, with deposited electrodes being formed on the opposing surfaces of the diaphragms, and depositing a metal on the diaphragms; and
a nickel protective layer directly provided on said pressure-sensing member, wherby a fluid pressure to be sensed is transferred to said pressure receiving part via said nickel protective layer and variations in an amount of a gap between the deposited electrodes formed on the opposing faces of the opposing diaphragms cause changes in capacitance.
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Accused Products
Abstract
A compact and highly accurate pressure sensor, and a method of fabricating the same are provided by improving functioning of a diaphragm which acts as a means for sensing a fluid pressure. An electrical capacitance-type diaphragm pressure sensor for sensing a fluid pressure is fabricated by providing non-metallic strip diaphragms in opposing relation to each other; forming deposited electrodes on the opposing surfaces of the diaphragms to form a pressure receiving part (10a) of a pressure-sensing member (10); depositing a metal on the diaphragms except for an end part of the pressure-sensing member where an electrode output terminal is formed; mounting a soluble flange along an approximate border between the end part and pressure receiving part of the pressure-sensing member; applying a nickel plating (22) as a protective layer to the pressure receiving part and the periphery of the flange; removing the flange except the nickel-plated protective layer; and mounting supporting members (31, 32) in the region where the flange was removed.
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Citations
6 Claims
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1. An electrical capacitance-type diaphragm pressure sensor comprising:
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a pressure-sensing member having a pressure receiving part formed from non-metallic strip diaphragms provided in opposing relation to each other, with deposited electrodes being formed on the opposing surfaces of the diaphragms, and depositing a metal on the diaphragms; and
a nickel protective layer directly provided on said pressure-sensing member, wherby a fluid pressure to be sensed is transferred to said pressure receiving part via said nickel protective layer and variations in an amount of a gap between the deposited electrodes formed on the opposing faces of the opposing diaphragms cause changes in capacitance. - View Dependent Claims (2, 3)
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4. A method of fabricating an electrical capacitance-type diaphragm pressure sensor for sensing a fluid pressure comprising the steps of:
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providing non-metallic strip diaphragms in opposing relation and forming deposited electrodes on the opposing faces of said diaphragms, to thereby form a pressure-receiving part of a pressure-sensing member;
depositing a metal on said diaphragms in said pressure-sensing member except for an end part where an electrode output terminal is formed;
installing a soluble flange along the approximate border between said end part and pressure receiving part of said pressure-sensing member;
applying a nickel plating as a protective layer to said pressure receiving part and the periphery of said flange of said pressure-sensing member;
removing said flange except for said nickel-plated protective layer in said pressure-sensing member; and
mounting a supporting member for installation in a region where said flange was removed except for said nickel-plated protective layer. - View Dependent Claims (5, 6)
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Specification