Surface-emitting light emitting device, manufacturing method for the same, optical module, and optical transmission apparatus

• US 20040120379A1
• Filed: 09/12/2003
• Published: 06/24/2004
• Est. Priority Date: 09/25/2002
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kaneko, Tsuyoshi, Kito, Satoshi, Hiramatsu, Tetsuo
• Granted Patent: US 7,187,702 B2
• Time in Patent Office: Days
• US Class Current: 372/50
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/0207 Substrates having a special shape
• CPC Class Codes: H01S 5/02251 using optical fibres
• CPC Class Codes: H01S 5/02255 using beam deflecting elements
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/18305 with emission through the substrate, i.e. bottom emission
• CPC Class Codes: H01S 5/18311 using selective oxidation
• CPC Class Codes: H01S 5/18388 Lenses

Abstract

To provide a surface-emitting light emitting device including an optical member whose mounting position, form, and size have been favorably controlled, and a method of manufacturing the same, as well as an optical module and an optical transmission apparatus that include this surface-emitting light emitting device, the surface-emitting light emitting device of the present invention can emit light perpendicular to a substrate and includes an emitting surface that emits the light, a base member that is provided on the emitting surface, and an optical member that is provided on an upper surface of the base member.

Claims

1. A surface-emitting light emitting device capable of emitting light in a direction perpendicular to a substrate, comprising:

an emitting surface that emits the light;

a base member that is provided on the emitting surface; and

an optical member that is provided on an upper surface of the base member.

2. The surface-emitting light emitting device according to claim 1,

the base member being made of a material that transmits light of a predetermined wavelength.

3. The surface-emitting light emitting device according to claim 1,

the optical member functioning as a lens.

4. The surface-emitting light emitting device according to claim 1,

the optical member functioning as a polarizer.

5. The surface-emitting light emitting device according to claim 1,

the optical member being in the shape of a sphere or an oval sphere.

6. The surface-emitting light emitting device according to any of claim 1,

a sealing member being formed so as to cover at least part of the optical member.

7. The surface-emitting light emitting device according to claim 1,

the upper surface of the base member being a curved surface.

8. The surface-emitting light emitting device according to claim 1,

an angle made between the upper surface of the base member and a surface on a side part of the base member that contacts the upper surface being an acute angle.

9. The surface-emitting light emitting device according to any of claim 1,

the surface-emitting light emitting device being a surface-emitting semiconductor laser.

10. The surface-emitting light emitting device according to claim 9,

the substrate being a semiconductor substrate;

and

the surface-emitting semiconductor laser being formed on the semiconductor substrate, includes a resonator having a pillar portion, and the emitting surface provided on an upper surface of the pillar portion.

11. The surface-emitting light emitting device according to claim 9,

the substrate being a semiconductor substrate;

the surface-emitting semiconductor laser including a resonator formed on the semiconductor substrate; and

the emitting surface being provided on a rear surface of the semiconductor substrate.

12. The surface-emitting light emitting device according to claim 9,

the substrate being a semiconductor substrate;

the surface-emitting semiconductor laser including a resonator formed on the semiconductor substrate;

a concave part being formed in a rear surface of the semiconductor substrate;

a light path adjusting layer being formed by being buried in the concave part; and

the emitting surface being provided on an upper surface of the light path adjusting layer.

13. The surface-emitting light emitting device according to claim 1,

the surface-emitting light emitting device being a semiconductor light emitting diode.

14. The surface-emitting light emitting device according to claim 13,

the substrate being a semiconductor substrate;

the semiconductor light emitting diode including a light emitting element that is formed on the semiconductor substrate, and a pillar portion that includes an active layer that forms at least part of the light emitting element; and

the emitting surface is provided on an upper surface of the pillar portion.

15. The surface-emitting light emitting device according to claim 10,

the base member being formed integrally with the pillar portion.

16. The surface-emitting light emitting device according to claim 15,

the base member being composed of a semiconductor layer.

17. The surface-emitting light emitting device according to claim 1,

the surface-emitting light emitting device being an electroluminescent device.

18. The surface-emitting light emitting device according to claim 10,

the pillar portion functioning as the base member.

19. The surface-emitting light emitting device according to claim 1,

the optical member functioning as a lens and being in the form of a truncated sphere;

a refractive index of the optical member being approximately equal to a refractive index of the base member;

a radius of curvature “

r”

of the optical member and a distance “

d”

from the emitting surface to a highest point of the optical member satisfies,

r≦

0.34*d.

20. An optical module, comprising:

the surface-emitting light emitting device according to claim 1, and an optical wave-guide.

21. An optical transmission apparatus, comprising:

the optical module according to claim 20.

22. A method of manufacturing a surface-emitting light emitting device capable of emitting light in a direction perpendicular to a substrate, comprising:

(a) forming a part that has an emitting surface and functions as the light emitting element;

(b) forming a base member on the substrate;

(c) discharging a droplet onto an upper surface of the base member to form an optical member precursor; and

(d) hardening the optical member precursor to form an optical member.

23. The method of manufacturing the surface-emitting light emitting device according to claim 22,

the droplet being discharged by using an ink jet method in step (c).

24. The method of manufacturing a surface-emitting light emitting device according to claim 22, further comprising:

(e) adjusting wettability of the upper surface of the base member with respect to the droplet before (c).