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Infrared thermopile detector system for semiconductor process monitoring and control

  • US 20040121494A1
  • Filed: 12/09/2003
  • Published: 06/24/2004
  • Est. Priority Date: 05/08/2002
  • Status: Active Grant
First Claim
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1. A semiconductor process system including flow circuitry for flow of or with a process fluid, said system comprising:

  • a fluid sampling region for the process fluid;

    an infrared radiation source constructed and arranged to transmit infrared radiation through the fluid sampling region;

    a thermopile detector constructed and arranged to receive infrared radiation after the transmission thereof through the fluid sampling region and to responsively generate an output signal correlative of concentration of at least one selected component of the process fluid; and

    process control means arranged to receive the output of the thermopile detector and to responsively control one or more process conditions in and/or affecting the semiconductor process system.

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