Integrated optical scanning image acquisition and display
First Claim
1. Apparatus for display of an image, in regard to a limited region of interest, comprising:
- a) a light source which emits light;
(b) a substrate that serves as a support;
(c) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to the substrate and the free end extending freely relative to the substrate, enabling the free end to move in the limited region of interest to scan light onto an image plane to create an image;
(d) an actuator disposed adjacent to the cantilever and being employed for deflecting the cantilever so as to move the free end in a desired motion, and (e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion.
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0 Petitions
Accused Products
Abstract
An apparatus and method for providing image acquisition and/or image display in a limited region of interest (ROI). The apparatus comprises a micro electromechanical system (MEMS), preferably integrating a light source, a cantilever, a lens, an actuator, a light detector, and a position sensor. The light source provides light for illuminating the ROI, displaying an image, providing a therapy, and/or performing other functions. The cantilever comprises a resin waveguide with a fixed end attached to a substrate that supports many or all other components. A free end of the cantilever is released from the substrate during fabrication and includes the lens. The actuator scans the free end in orthogonal directions to illuminate the ROI or display an image. The position sensors detect the position of the free end for control. The light detector receives light backscattered from the ROI separate from, or at the fixed end the cantilever.
224 Citations
58 Claims
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1. Apparatus for display of an image, in regard to a limited region of interest, comprising:
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a) a light source which emits light;
(b) a substrate that serves as a support;
(c) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to the substrate and the free end extending freely relative to the substrate, enabling the free end to move in the limited region of interest to scan light onto an image plane to create an image;
(d) an actuator disposed adjacent to the cantilever and being employed for deflecting the cantilever so as to move the free end in a desired motion, and (e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator to cause the cantilever to move in the desired motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. Apparatus for use either for a far-field image acquisition or for a display of an image, in regard to a limited region of interest, comprising:
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(a) a light source which emits light;
(b) a substrate that serves as a support;
(c) a cantilever comprising a fixed end and a free end, the fixed end remaining fixed to the substrate upon which the cantilever was originally formed and the free end extending freely beyond where the substrate has been removed from supporting the cantilever, enabling the free end to move relative to the substrate in the limited region of interest;
(d) an actuator disposed adjacent to the cantilever, the actuator being employed for deflecting the cantilever so as to move the free end in a desired motion, and (e) a position sensor employed for detecting a position of the free end of the cantilever, for producing a signal used in controlling the actuator td cause the cantilever to move in the desired motion. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. A method for enabling either a far-field image acquisition or a display of an image, in regard to a limited region of interest, comprising the steps of:
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(a) forming a cantilever on a substrate;
(b) removing a portion of the substrate underlying the cantilever;
(c) supporting the cantilever at a fixed end of the cantilever, the fixed end remaining fixed to the substrate, a free end of the cantilever extending freely beyond where the portion of the substrate was removed from supporting the cantilever, enabling the free end to move relative to a target in the limited region of interest;
(d) deflecting the cantilever so as to move the free end in a desired motion; and
(e) detecting a position of the free end of the cantilever, producing a signal indicative of the position for use in controlling the cantilever to move in the desired motion. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58)
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Specification