Parallel fault detection
First Claim
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1. A method, comprising:
- receiving data associated with processing of a workpiece by a first processing tool;
receiving data associated with processing of a workpiece by a second processing tool; and
comparing at least a portion of the received data to a fault model common to both of the processing tools to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
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Abstract
A method and an apparatus are provided for parallel fault detection. The method comprises receiving data associated with processing of a workpiece by a first processing tool, receiving data associated with processing of a workpiece by a second processing tool and comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
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Citations
22 Claims
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1. A method, comprising:
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receiving data associated with processing of a workpiece by a first processing tool;
receiving data associated with processing of a workpiece by a second processing tool; and
comparing at least a portion of the received data to a fault model common to both of the processing tools to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus, comprising:
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an interface adapted to receive trace data associated with processing of workpieces by the first and second processing tools; and
a control unit communicatively coupled to the interface, the control unit adapted to detect a fault associated with at least one of the first and second processing tool based on comparing at least a portion of the received trace data to a fault model representative of an acceptable operational range of at least the first and second processing tools. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An apparatus, comprising:
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means for receiving data associated with processing of a workpiece by a first processing tool;
means for receiving data associated with processing of a workpiece by a second processing tool; and
means for comparing at least a portion of the received data to a common fault model to determine if a fault associated with at least one of the processing of the workpiece by the first processing tool and processing of the workpiece by the second processing tool occurred.
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16. An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:
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receive data associated with processing of a workpiece by a first processing tool and receive data associated with processing of a workpiece by a second processing tool; and
compare at least a portion of the received data to a fault model to determine if a fault associated with the processing of the workpiece by the first processing tool occurred, wherein the fault model is representative of the first and the second processing tool. - View Dependent Claims (17, 18, 19, 20)
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21. A system, comprising:
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a first processing tool adapted to process a wafer;
a second processing tool adapted to process a wafer; and
a fault detection unit adapted to;
receive data associated with the processing of the wafer by the first processing tool and by the second processing tool; and
detect a fault associated with at least one of the first and second processing tool based on comparing at least a portion of the received data to a fault model, wherein the fault model is representative of an acceptable operational range of at least the first and second processing tools. - View Dependent Claims (22)
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Specification