ANALYSIS OF MEMS MIRROR DEVICE USING A LASER FOR MIRROR REMOVAL
First Claim
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1. A method of inspecting a target mirror element of a MEMS mirror device, comprising the steps of:
- selecting one or more mirrors to be removed; and
using a laser to remove the selected one or more mirrors.
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Abstract
A method of analyzing a MEMS device having micromirrors. A laser is targeted on one or more mirror elements and used to remove only the mirror. Once the mirror is removed, the underlying structure can be observed in operation, measured, elementally analyzed, or undergo other types of analysis.
5 Citations
14 Claims
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1. A method of inspecting a target mirror element of a MEMS mirror device, comprising the steps of:
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selecting one or more mirrors to be removed; and
using a laser to remove the selected one or more mirrors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of analyzing a target mirror element of a MEMS mirror device, comprising the steps of:
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selecting one or more mirrors to be removed;
using a laser to remove the selected one or more mirrors; and
performing an elemental analysis of the structure underlying the mirror. - View Dependent Claims (13, 14)
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Specification