Plasma processor apparatus and method, and antenna

• US 20040124779A1
• Filed: 12/31/2002
• Published: 07/01/2004
• Est. Priority Date: 12/31/2002
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Howald, Arthur M., Kuthi, Andras
• Granted Patent: US 6,876,155 B2
• Time in Patent Office: Days
• US Class Current: 315/111.51
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32183 Matching circuits

Abstract

An antenna includes excitation terminals responsive to an RF source to supply an RF electromagnetic field to a plasma that processes a workpiece in a vacuum chamber. A matching network includes first and second portions respectively between the source and terminals and between the terminals and the antenna plasma excitation coil. In response to indications of impedance matching between the source and its load, currents flowing between (1) the first portion and the terminals and (2) the terminals and the coil are controlled so the latter exceeds the former. The indications control impedances of the first and second portions or the first portion impedance and the source frequency. The coil can include a transformer having a primary winding coupled to the excitation terminals and a multi-turn plasma excitation secondary winding.

Claims

1. A plasma processor antenna adapted to be driven by power from an AC source, the antenna comprising first and second excitation terminals adapted to be powered by power from the source, a plasma excitation coil arranged to be energized by power coupled to said first and second excitation terminals via circuitry outside the antenna, the antenna having connections and reactances with values causing current flowing through the excitation terminals via the circuitry outside the antenna to be less than current flowing in a plasma excitation winding of the coil.

2. The antenna of claim 1 wherein the connections and reactances enable the antenna and its load to be impedance matched or approximately impedance matched to the source.

3. The antenna of claim 1 wherein the connections and reactances cause the current adapted to flow in the plasma excitation winding to be maximized or approximately maximized.

4. The antenna of claim 1 wherein the connections and reactances cause the current flowing in the plasma excitation winding to be at least two times the current flowing through the excitation terminals via the circuitry outside the antenna.

5. The antenna of claim 1 wherein the source has at least one frequency in a range of frequencies, the connections and the reactances causing a loop of the antenna including the plasma excitation winding to have a resonant frequency equal to or near a frequency in the range.

6. The antenna of claim 1 wherein the connections and the reactances cause a loop of the antenna including the plasma excitation winding to have a resonant frequency equal to or near a frequency in the range, the loop including a first capacitor connected in series with the plasma excitation winding.

7. The antenna of claim 6 wherein the first capacitor is connected in series between first and second segments of the winding so the same current flows through the first capacitor and the first and second segments.

8. The antenna of claim 1 further including a first capacitor connected in series with the coil between the first and second excitation terminals and a second capacitor connected between the first and second excitation terminals such that only some of the current flowing in the first capacitor and the plasma excitation winding flows in the second capacitor.

9. The antenna of claim 8 wherein the first capacitor is connected between one of the excitation terminals and one end of the winding so the same current flows through the first capacitor and the winding.

10. The antenna of claim 8 wherein the first capacitor is connected in series between first and second segments of the winding so the same current flows through the first capacitor and the first and second segments.

11. The antenna of claim 1 wherein the coil includes a transformer having a primary winding and a plasma excitation secondary winding reactively coupled with the primary winding.

12. The antenna of claim 11 wherein the primary winding has opposite ends connected to the first and second excitation terminals.

13. The antenna of claim 12 wherein a coupling coefficient between the windings is such that there is loose transformer coupling of the impedance of the secondary winding to the primary winding.

14. The antenna of claim 13 wherein the coupling coefficient is in the range of about 0.1 to 0.3.

15. The antenna of claim 11 wherein a coupling coefficient between the windings is such that there is loose transformer coupling of the impedance of the secondary winding to the primary winding.

16. The antenna of claim 11 wherein a capacitor is connected in series with the plasma excitation secondary winding.

17. The antenna of claim 16 wherein the capacitor and plasma excitation secondary winding are connected in a closed loop.

18. The antenna of claim 17 wherein the secondary winding includes plural turns.

19. The antenna of claim 18 wherein the plural turns are in differing planes adapted to be parallel to a coupling window of a chamber of the processor.

20. The antenna of claim 19 wherein the turns are connected in series and arranged so that current induced therein in response to AC current flowing in the primary winding flows in a closed loop.

21. The antenna of claim 13 wherein the secondary winding includes plural turns.

22. The antenna of claim 21 wherein the plural turns are concentric with an axis of the coil, the primary winding including at least one further turn that is concentric with the coil axis and is in a plane spatially parallel to the plural turns of the secondary winding.

23. A plasma processor including the antenna of claim 1, the processor including the AC source and a vacuum chamber having an interior arranged to be responsive to electromagnetic fields derived by the antenna in response excitation by the AC source.

24. An antenna for a plasma processor, the antenna being adapted to be driven by power from an AC source for exciting a plasma, comprising first and second excitation terminals, a coil including (a) a primary winding having opposite ends respectively coupled with the first and second excitation terminals, and (b) a secondary winding reactively coupled with the primary winding;

and a capacitor having first and second opposite electrodes respectively connected in series with the secondary winding.

25. The antenna of claim 24 wherein the secondary winding is arranged to be excited by the AC source only via the reactive coupling with the primary winding.

26. The antenna of claim 25 wherein a coupling coefficient between the windings is such that there is loose transformer coupling of the impedance of the secondary winding to the primary winding.

27. The antenna of claim 26 wherein the coupling coefficient is in the range of about 0.1 to 0.3.

28. The antenna of claim 27 wherein the secondary winding includes plural turns.

29. The antenna of claim 28 wherein the turns are in different parallel planes adapted to be spatially parallel to a coupling window of a vacuum chamber of the processor.

30. The antenna of claim 29 wherein the plural turns are concentric with an axis of the coil, the primary winding including at least one further turn that is concentric with the coil axis and is in a plane spatially parallel to the plural turns of the secondary winding.

31. The antenna of claim 30 wherein the secondary winding includes multiple turns in each of the planes.

32. The antenna of claim 31 wherein the turns of the secondary winding are connected in series with each other and arranged so AC current induced to flow therein in response to excitation of the primary winding flows in the same direction in half planes extending from the axis through the turns.

33. The antenna of claim 32 wherein the turns of the secondary winding are closed on themselves.

34. The antenna of claim 24 wherein the secondary winding includes plural turns that are closed on themselves.

35. A plasma processor including the antenna of claim 24, the processor including the AC source and a vacuum chamber having an interior arranged to be responsive to electromagnetic fields derived by the antenna in response excitation by the AC source.

37. The antenna of claim 29 wherein the secondary winding is arranged to be excited by the AC source only via the reactive coupling with the primary winding.

38. The antenna of claim 37 wherein a transformer coupling coefficient between the windings is such that there is loose coupling of the impedance of the secondary winding to the primary winding.

39. The antenna of claim 38 wherein the coupling coefficient is in the range of about 0.1 to 0.3.

40. The antenna of claim 37 wherein the turns are in different parallel planes adapted to be spatially parallel to a coupling window of a vacuum chamber of the processor.

41. The antenna of claim 40 wherein the plural turns are concentric with an axis of the coil, the primary winding including at least one further turn that is concentric with the coil axis and is in a plane spatially parallel to the plural turns of the secondary winding.

42. The antenna of claim 41 wherein the secondary winding includes multiple turns in each of the planes.

43. The antenna of claim 42 wherein the turns of the secondary winding are connected in series with each other and arranged so AC current induced to flow therein in response to excitation of the primary winding flows in the same direction in half planes extending from the axis through the turns.

44. The antenna of claim 43 wherein the turns of the secondary winding are closed on themselves.

45. The antenna of claim 44 wherein the plural turns are closed on themselves.

46. The antenna of claim 45 wherein a transformer coupling coefficient between the windings is such that there is loose coupling of the impedance of the secondary winding to the primary winding.

47. A plasma processor including the antenna of claim 46, the processor including the AC source and a vacuum chamber having an interior arranged to be responsive to electromagnetic fields derived by the antenna in response excitation by the AC source.

48. A plasma processor including the antenna of claim 37, the processor including the AC source and a vacuum chamber having an interior arranged to be responsive to electromagnetic fields derived by the antenna in response excitation by the AC source.

36. An antenna for a plasma processor, the antenna being adapted to be driven by power from an AC source for exciting a plasma, comprising first and second excitation terminals, a coil including (a) a primary winding having opposite ends respectively coupled with the first and second excitation terminals, and (b) a secondary winding reactively coupled with the primary-winding, the secondary winding including plural turns.

49. Apparatus for processing a workpiece with a plasma comprising a vacuum chamber arranged to process the workpiece with an AC plasma, an antenna for supplying an AC electromagnetic field to the plasma, an AC plasma excitation source, circuitry for coupling the AC source to excitation terminals of the antenna, the antenna including a plasma excitation coil for supplying a plasma exciting electromagnetic field to the plasma, and a controller for causing current flowing between the coupling circuitry and the excitation terminals to be less than current flowing in the coil.

50. The apparatus of claim 49 wherein the coupling circuitry includes a matching network, a first portion of the matching network being coupled between the source and the excitation terminals, the controller being arranged for adjusting a variable impedance of the matching network so the source output impedance is matched to the load of the source.

51. The apparatus of claim 50 wherein the source has a variable frequency, the controller being arranged for adjusting the first variable impedance and the source variable frequency to cause the current flowing between the coupling circuitry and the excitation terminals to be less than current flowing in the coil.

52. The apparatus of claim 51 wherein the controller includes a sensor arrangement for deriving first and second indications respectively associated with a desired frequency of the source and the impedance match between the source and the load of the source, the controller being arranged to respond to the indications derived by the sensor arrangement to control the source frequency and the value of the first impedance to provide the impedance match.

53. The apparatus of claim 52 wherein the sensor arrangement is arranged to derive the first indication in response to an indication of maximum current flowing in the coil.

54. The apparatus of claim 52 wherein the sensor arrangement is arranged to derive the first and second indications in response to signals indicative of power reflected from the load toward the source.

55. The apparatus of claim 51 wherein the controller includes a sensor arrangement for deriving an indication of the impedance match between the source and the load of the source, the controller being arranged to respond to the impedance match indication derived by the sensor arrangement to provide the impedance match and to control the source frequency so the source frequency equals or nearly equals a resonant frequency of a series circuit including a plasma excitation coil of the antenna.

56. The apparatus of claim 50 wherein the second portion of the matching network includes a second variable impedance, the controller being arranged for adjusting the first variable impedance and the second variable impedance to cause the current flowing between the coupling circuitry and the excitation terminals to be less than current flowing in the coil.

57. The apparatus of claim 56 wherein the controller arrangement includes a sensor arrangement for deriving an indication of an impedance match between the source and the load of the source, the controller being arranged to respond to the impedance match indication derived by the sensor to control the first and second impedances to attain an impedance match.

58. The apparatus of claim 49 wherein the antenna includes a first capacitor connected between the first and second excitation terminals and a second capacitor connected in series with a plasma excitation winding of the coil between the first and second excitation terminals, the first and second capacitors being connected so different magnitude currents flow therein.

59. The apparatus of claim 58 wherein the winding having the second capacitor connected in series with it has a gap between a pair of terminals, at least one terminal of the pair of terminals differing from the excitation terminals, the second capacitor having opposite electrodes respectively connected to the pair of terminals.

60. The apparatus of claim 59 wherein both terminals of the pair of terminals differ from the first and second excitation terminals.

61. The apparatus of claim 49 wherein the coil includes a transformer having primary and secondary windings, the primary winding being connected to be driven by the coupling circuitry, the secondary winding being arranged for coupling a plasma excitation electromagnetic field to the plasma.

62. The apparatus of claim 61 further including a capacitor connected in series with the secondary winding.

63. The apparatus of claim 62 wherein a coupling coefficient between the windings is such that there is loose coupling of the impedance of the secondary winding to the primary winding.

64. The apparatus of claim 63 wherein the coupling coefficient is in the range of about 0.1 to 0.3.

65. The apparatus of claim 61 wherein the secondary winding includes plural turns.

66. The apparatus of claim 65 wherein the plural turns are in differing planes parallel to a coupling window of a chamber of the processor.

67. The apparatus of claim 65 wherein the turns are connected in series and arranged so that current induced therein in response to AC current flowing in the primary winding causes magnetic fluxes resulting from them to aid in the plasma.

68. A method of operating a vacuum plasma processor having a vacuum chamber including an AC plasma that processes a workpiece, the AC plasma being excited by an antenna that supplies an AC electromagnetic field to the plasma, the antenna being driven by power derived from an AC plasma excitation source and coupled to first and second excitation terminals of the antenna via coupling circuitry between the source and the terminals, the method comprising causing the current flowing in a plasma excitation coil of the antenna to exceed the current flowing between the coupling circuitry and the antenna excitation terminals.

69. The method of claim 68 wherein the source has a variable frequency, the causing step including adjusting the source variable frequency.

70. The method of claim 69 wherein the coupling circuitry includes a portion of a matching network coupled between the source and the excitation terminals, the causing step including adjusting a variable impedance of the matching network portion so the source output impedance is at least approximately matched to the load of the source.

71. The method of claim 70 further including deriving an indication of the impedance match between the source and the load of the source, and responding to the impedance match indication to adjust an impedance of the matching network portion and the source frequency so the source impedance is matched to the load of the source.

72. The method of claim 68 wherein the coupling circuitry includes first and second portions of a matching network respectively coupled between the source and the excitation terminals and between the excitation terminals and the coil, the causing step including adjusting a first variable impedance of the first portion and adjusting a second variable impedance of the second portion.

73. The method of claim 72 further including deriving an indication of the impedance match between the source and the load of the source, and responding to the impedance match indication to adjust an impedance of the impedances of the first and second portions so the source impedance is matched to the load of the source.