METHOD FOR ANALYZING DEFECT INSPECTION PARAMETERS
First Claim
1. A method for analyzing defect inspection parameters, the method being utilized for analyzing a plurality of lots of products, each of the plurality of lots of products having a lot number, the plurality of lots of products being fabricated through a plurality of manufacturing equipment, at least one wafer in each of the plurality of lots of products being inspected according to at least one defect inspection item to generate at least one defect inspection parameter, the defect inspection item, the defect inspection parameter, and a process step correlated to the defect inspection item being stored in a database, the method comprising:
- searching for the defect inspection parameters of the plurality of lots of products from the database;
classifying the plurality of lots of products into at least two groups according to the defect inspection parameters, the groups comprising a qualified group and a failed group;
searching for the process step correlated to the defect inspection item from the database;
searching for the manufacturing equipment through which the qualified group has passed in the process step;
searching for the manufacturing equipment through which the failed group has passed in the process step; and
determining the manufacturing equipment through which the probability that the failed group has passed which is greater than that of the qualified group.
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Abstract
The claimed invention method is for analyzing defect inspection parameters. The method includes searching for the defect inspection parameters of a plurality of lots of products from a database, classifying the plurality of lots of products into at least a qualified group and a failed group according to the defect inspection parameters, searching for a process step correlated to a defect inspection item from the database, searching for manufacturing equipment through which the qualified group has passed in the process step and the manufacturing equipment through which the failed group has passed in the process step, and determining the manufacturing equipment through which the probability that the failed group having passed which is greater than that of the qualified group.
17 Citations
10 Claims
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1. A method for analyzing defect inspection parameters, the method being utilized for analyzing a plurality of lots of products, each of the plurality of lots of products having a lot number, the plurality of lots of products being fabricated through a plurality of manufacturing equipment, at least one wafer in each of the plurality of lots of products being inspected according to at least one defect inspection item to generate at least one defect inspection parameter, the defect inspection item, the defect inspection parameter, and a process step correlated to the defect inspection item being stored in a database, the method comprising:
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searching for the defect inspection parameters of the plurality of lots of products from the database;
classifying the plurality of lots of products into at least two groups according to the defect inspection parameters, the groups comprising a qualified group and a failed group;
searching for the process step correlated to the defect inspection item from the database;
searching for the manufacturing equipment through which the qualified group has passed in the process step;
searching for the manufacturing equipment through which the failed group has passed in the process step; and
determining the manufacturing equipment through which the probability that the failed group has passed which is greater than that of the qualified group. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification