Component operating with bulk acoustic waves, and having coupled resonators
First Claim
1. A component operating with bulk acoustic waves, comprising:
- an acoustic mirror comprising an electrically conductive mirror layer that acts as a coupling layer;
a signal path along which an electrical signal is guided; and
a number N of resonators that are electrically connected to one another and each having a lower and an upper electrode, with n resonators, where 2≦
n≦
N−
1, being arranged jointly and alongside one another on the acoustic mirror, the n resonators being coupled to one another via coupling capacitances that are formed;
a) by lower electrodes of the n resonators, and b) by at least one of the coupling layer and further capacitively coupled electrically conductive mirror layers, with the n resonators being arranged and electrically connected to one another such that the coupling capacitance does not bridge any of the resonators in the signal path.
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Accused Products
Abstract
The invention relates to a component operating with bulk acoustic waves, which comprises a mount substrate, thin-film resonators and an acoustic mirror, with coupled resonators being arranged jointly on this mirror. At least one mirror layer—a coupling layer—is in the form of an electrically conductive layer. This mirror layer forms coupling capacitances with lower electrodes of the resonators, thus resulting in deliberate capacitive coupling between the resonators which, according to the invention, is used in order to achieve additional pole points in the blocking areas of the filter transfer function. The capacitive coupling of the resonators may, for example, be influenced by partial structuring of the coupling layer in order, in particular, to shift the frequency of the pole points.
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Citations
13 Claims
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1. A component operating with bulk acoustic waves, comprising:
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an acoustic mirror comprising an electrically conductive mirror layer that acts as a coupling layer;
a signal path along which an electrical signal is guided; and
a number N of resonators that are electrically connected to one another and each having a lower and an upper electrode, with n resonators, where 2≦
n≦
N−
1, being arranged jointly and alongside one another on the acoustic mirror, the n resonators being coupled to one another via coupling capacitances that are formed;
a) by lower electrodes of the n resonators, and b) by at least one of the coupling layer and further capacitively coupled electrically conductive mirror layers, with the n resonators being arranged and electrically connected to one another such that the coupling capacitance does not bridge any of the resonators in the signal path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification