Liquid crystal display device and method of fabricating the same
First Claim
1. A method of fabricating a liquid crystal display device, comprising the steps of:
- forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process;
forming a gate insulating layer and an active layer on an entire surface of the substrate;
forming a first organic material film on an entire surface of the substrate;
removing a portion of the first organic material film to expose a first portion of the gate pad;
depositing a transparent film on an entire surface of the substrate;
patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer;
exposing portions of the data pad and data bus line using a third mask;
forming a second organic material film on an entire surface of the substrate;
depositing a low resistance material on the data bus line;
coating a passivation film on the substrate;
removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad.
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Accused Products
Abstract
A method of fabricating a liquid crystal display device includes forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process, forming a gate insulating layer and an active layer on an entire surface of the substrate, forming a first organic material film on an entire surface of the substrate, removing a portion of the first organic material film to expose a first portion of the gate pad, depositing a transparent film on an entire surface of the substrate, patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer, exposing portions of the data pad and data bus line using a third mask, forming a second organic material film on an entire surface of the substrate, depositing a low resistance material on the data bus line, coating a passivation film on the substrate, removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad.
27 Citations
19 Claims
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1. A method of fabricating a liquid crystal display device, comprising the steps of:
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forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process;
forming a gate insulating layer and an active layer on an entire surface of the substrate;
forming a first organic material film on an entire surface of the substrate;
removing a portion of the first organic material film to expose a first portion of the gate pad;
depositing a transparent film on an entire surface of the substrate;
patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer;
exposing portions of the data pad and data bus line using a third mask;
forming a second organic material film on an entire surface of the substrate;
depositing a low resistance material on the data bus line;
coating a passivation film on the substrate;
removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating a liquid crystal display device, comprising the steps of:
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forming a gate electrode, a gate bus line, and a gate pad on a substrate;
forming a gate insulating layer, an active layer, and a transparent film on an entire surface of the substrate;
patterning the active layer and transparent conductive film to form a data bus line, a data pad, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer;
forming a passivation layer on an entire surface of the substrate; and
exposing portions of the gate and data pads, wherein the data bus line, and the source, drain, and pixel electrodes include the transparent conductive film. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A liquid crystal display device, comprising:
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a gate electrode, a gate bus line, and a gate pad on a substrate;
a data bus line and data pad on the substrate;
a gate insulating layer an entire surface of the substrate;
an active layer on a portion of the gate insulating layer;
a source electrode, a drain electrode, and a pixel electrode on the active layer; and
a low resistance material on the data bus line, wherein the data bus line, the gate and data pads, the source and drain electrodes, and the pixel electrode are formed of transparent conductive material. - View Dependent Claims (15, 16)
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17. A liquid crystal display device, comprising:
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a gate bus line on a substrate;
a gate insulating layer formed on the gate bus line;
an active layer formed on the gate insulating layer; and
an auxiliary capacitor electrode including indium tin oxide film formed exclusively on the active layer. - View Dependent Claims (18, 19)
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Specification