Micromirror elements, package for the micromirror elements, and projection system therefor

• US 20040125346A1
• Filed: 01/29/2003
• Published: 07/01/2004
• Est. Priority Date: 09/24/1998
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Venture Lending & Leasing IV Incorporated
• Inventors: Huibers, Andrew G
• Granted Patent: US 6,962,419 B2
• Time in Patent Office: Days
• US Class Current: 353/98
• CPC Class Codes: G03B 21/28 Reflectors in projection beam in illumination beam G03B21/2066
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48472 the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/16195 Flat cap [not enclosing an internal cavity]
• CPC Class Codes: H04N 5/7458 the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]

Abstract

In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

Claims

1. A projection system, comprising:

an array of active micromirrors disposed in a rectangular shape, the micromirrors capable of rotation around a switching axis between an off-state and an on-state, the micromirrors corresponding to pixels in a viewed image;

a light source for directing light to the array of micromirrors, the light source disposed so as to direct light non-perpendicular to at least two sides of each micromirror, and parallel, when viewed as a top view of each micromirror, to at least two other sides of each micromirror;

collection optics disposed to receive light from micromirrors in an on-state.

2. The system of claim 1, wherein the light source directs light at an angle substantially perpendicular to the switching axes of the micromirrors.

3. The system of claim 1, further comprising a color separating element provided between the light source and the micromirror array.

4. The system of claim 1, wherein the light source is disposed to direct light at the micromirrors such that the light impinges on a leading side of each micromirror at an angle of from 100 to 150 degrees.

5. The system of claim 1, wherein the micromirrors comprise metal and a dielectric material.

6. The system of claim 5, wherein the dielectric material is a nitride, carbide or oxide of silicon.

7. The system of claim 1, wherein the micromirrors are disposed above a circuit substrate.

8. The system of claim 7, wherein the circuit substrate is a CMOS substrate.

9. The system of claim 1, wherein the micromirrors are attached to an upper glass substrate which is bonded to a lower silicon substrate.

10. The system of claim 9, wherein the upper and lower substrates are held together via UV and/or IR epoxy.

11. The system of claim 1, wherein from 64,000 to about 6,000,000 micromirrors are provided in an area of from about 1 cm² to about 1 in².

12. The system of claim 11, further comprising a rectangular mask disposed on or above the micromirror array.

13. The system of claim 1, wherein the micromirror array comprises four corner active micromirrors which define a rectangle with four sides.

14. The system of claim 13, wherein the micromirrors comprise at least four elongated micromirror sides, one or more of the micromirror sides being neither parallel nor perpendicular to any side of the rectangle defined by the four corner active micromirrors.

15. The system of claim 14, wherein no micromirror side is parallel or perpendicular to any side of the micromirror rectangle array.

16. The system of claim 14, wherein at least two micromirror sides are neither parallel or perpendicular to the sides of the micromirror array rectangle, and wherein at least two micromirror sides are parallel to sides of the micromirror array rectangle.

17. The system of claim 1, wherein each micromirror comprises one or more hinges that extend in a direction at an angle between 0 and 90 degrees from the axis of rotation of the micromirror.

18. The system of claim 17, wherein the one or more hinges extend at an angle of about 45 degrees to the direction of the axis of rotation.

19. The system of claim 1, wherein each micromirror has a shape of a parallelogram or an assembly of parallelograms.

20. The system of claim 19, wherein each micromirror has a shape of an assembly of from 2 to 7 parallelograms.

21. The system of claim 20, wherein each micromirror has a shape of an assembly of from 2 to 4 parallelograms.

22. The system of claim 20, wherein the shape as an assembly of parallelograms appears as a series of parallelograms each a micromirror image of an adjacent parallelogram.

23. The system of claim 20, wherein the shape as an assembly of parallelograms appears as a series of identical parallelograms.

24. The system of claim 1, wherein said at least two sides are on the leading and/or trailing sides of the micromirrors.

25. The system of claim 24, wherein the leading and trailing sides are jagged or saw-tooth sides.

26. The system of claim 20, wherein the width of each parallelogram in the assembly has a width substantially greater than the wavelength of light directed at the micromirrors.

27. The system of claim 19, wherein the number of parallelograms is less than MIA, where M is the width of the micromirror and λ

is the wavelength of incident light.

28. The system of claim 27, wherein the number of parallelograms is less than 0.5M/λ

.

29. The system of claim 28, wherein the number of parallelograms is less than 0.1 M/λ

.

30. The system of claim 1, wherein the micromirrors comprises 5 or more elongated straight sides.

31. The system of claim 30, wherein the 6 or more sides form a shape with at least one projection and cut-out.

32. The system of claim 30, wherein the micromirrors comprise 8 or more sides.

33. The system of claim 31, wherein the projection and cut-out are in the form of a triangle.

34. The system of claim 31, wherein the projection forms an exterior angle of from 70 to 120 degrees, and the cut-out forms a corresponding interior angle of from 70 to 120 degrees.

35. The system of claim 1, wherein the micromirrors have shapes other than substantially rectangular.

36. The system of claim 1, wherein the micromirrors have at least two exterior angles of between 35 and 60 degrees.

37. The system of claim 1, wherein the micromirrors have straight sides that are neither parallel nor perpendicular to the sides of the rectangular active area.

287. The projection system of claim 1, wherein each micromirror is capable of pivoting to an on position that directs light to the light collection optics and capable of pivoting in an opposite direction to an off position for directing light away from the light collection optics, the micromirrors capable of pivoting to a greater extent to the on position than to the off position.

288. The projection system of claim 287, wherein each micromirror is capable of pivoting from −

1 to −

10 degrees from a rest position to the off position, and capable of pivoting greater than +10 degrees from the rest position to the on position.

289. The projection system of claim 288, wherein each micromirror is capable of pivoting from −

1 to −

11 degrees from the rest position to the off position, and capable of pivoting from +12 to +20 degrees from the rest position to the on position.

290. The projection system of claim 287, wherein the micromirrors are capable of pivoting at least three degrees further to the on position than to the off position, though in opposite directions.

291. The projection system of claim 287, wherein the collection optics is a single lens or group of lenses for all of the micromirrors in the array.

292. The projection system of claim 287, wherein the array of micromirrors are disposed in a package, the package having a light transmissive window that is at an angle to a substrate on which the micromirrors are formed.

293. The projection system of claim 292, wherein the window is at an angle of from −

2 to −

15 degrees relative to the substrate.

295. The projection system of claim 288, wherein the window is at an angle of from −

3 to −

10 degrees relative to the substrate.

296. The projection system of claim 1, wherein the array of micromirrors are disposed in a package, the package having a light transmissive window that is at an angle to a substrate on which the micromirrors are formed.

297. The projection system of claim 296, wherein the window is at an angle of from −

2 to −

15 degrees relative to the substrate.

298. The projection system of claim 288, wherein the window is at an angle of from −

3 to −

10 degrees relative to the substrate.

38. A projection system, comprising:

an array of micromirrors, each micromirror corresponding to a pixel in a viewed image and having a shape of a concave polygon or one or more non-rectangular parallelograms;

a light source for directing light to the array of micromirrors collection optics disposed to receive light reflected from the micromirrors.

39. The system of claim 38, wherein each micromirror has a shape of a non-rectangular parallelogram or an assembly of non-rectangular parallelograms side by side.

40. The system of claim 39, wherein each micromirror has a shape of an assembly of from 2 to 7 parallelograms.

41. The system of claim 40, wherein each micromirror has a shape of an assembly of from 2 to 4 parallelograms.

42. The system of claim 40, wherein the shape as an assembly of parallelograms appears as a series of parallelograms each a micromirror image of an adjacent parallelogram.

43. The system of claim 40, wherein the shape is a concave polygon having six or more sides and at least one concave portion.

44. The system of claim 38, wherein said at least two sides are on the leading and/or trailing sides of the micromirrors.

45. The system of claim 44, wherein the leading and trailing sides are jagged or saw-tooth sides.

46. The system of claim 40, wherein the width of each parallelogram in the assembly has a width substantially greater than the wavelength of light directed at the micromirrors.

47. The system of claim 39, wherein the number of parallelograms is less than M/λ

, where M is the width of the micromirror and λ

is the wavelength of incident light.

48. The system of claim 47, wherein the number of parallelograms is less than 0.5M/λ

.

49. The system of claim 48, wherein the number of parallelograms is less than 0.1 M/λ

.

50. The system of claim 38, wherein the micromirrors comprise 6 or more elongated straight sides.

51. The system of claim 50, wherein the 6 or more sides form a shape with at least one projection and cut-out.

52. The system of claim 50, wherein the micromirrors comprise 8 or more sides.

53. The system of claim 51, wherein the projection and cut-out are in the form of a triangle.

54. The system of claim 51, wherein the projection forms an exterior angle of from 70 to 120 degrees, and the cut-out forms a corresponding interior angle of from 70 to 120 degrees.

55. The system of claim 38, wherein the micromirrors have shapes that are substantially different from a square shape.

56. The system of claim 38, wherein the micromirrors have at least two exterior angles of between 35 and 60 degrees.

57. The system of claim 38, wherein the micromirrors have straight sides that are neither parallel nor perpendicular to the sides of the rectangular active area.

58. The system of claim 38, wherein each micromirror has the shape of a concave polygon having more than 4 sides and 4 angles.

59. An array of movable micromirrors, each micromirror having a shape substantially the same as that illustrated in any of FIGS. 14A to F, 15A to F, 17 to 19, and 20A to L.

60. An array of movable micromirrors, the array having a substantially rectangular shape and comprising at least 1,000 micromirrors, wherein the micromirrors are in the shape of a concave or convex polygon and wherein no sides of the polygonal micromirrors are parallel to the sides of the substantially rectangular active area.

61. The array of claim 60, wherein the micromirrors have at least 4 substantially straight sides, none of which are parallel to leading or trailing sides of the rectangular active area.

62. The array of claim 61, wherein the array comprises four corner micromirrors which, when connected together, form the rectangular shape of the array.

63. The array of claim 60, wherein the micromirrors have switching axes parallel to at least two sides of the rectangular array.

64. The array of claim 60, wherein each micromirror has a shape of a parallelogram or an assembly of parallelograms.

65. The array of claim 64, wherein each micromirror has a shape of an assembly of from 2 to 7 parallelograms.

66. The array of claim 65, wherein each micromirror has a shape of an assembly of from 2 to 4 parallelograms.

67. The array of claim 65, wherein the shape as an assembly of parallelograms appears as a series of parallelograms each a micromirror image of an adjacent parallelogram.

68. The array of claim 65, wherein the shape as an assembly of parallelograms appears as a series of identical parallelograms.

69. The array of claim of claim 60, wherein the micromirrors comprises 5 or more elongated straight sides.

70. The array of claim 69, wherein the micromirrors comprise 6 or more sides form a shape with at least one projection and cut-out.

71. The array of claim 69, wherein the micromirrors comprise 8 or more sides.

72. The array of claim 70, wherein the projection and cut-out are in the form of a triangle.

73. The array of claim 70, wherein the projection forms an exterior angle of from 70 to 120 degrees, and the cut-out forms a corresponding interior angle of from 70 to 120 degrees.

74. The array of claim 60, wherein the micromirrors have at least two polygon sides that form an angle therebetween of less than 90 degrees.

75. The array of claim 74, wherein the micromirrors have at least two polygon sides that form an angle therebetween of from 35 to 60 degrees.

76. The array of claim 60, wherein the micromirrors each have a shape of an assembly of from 1 to 10 parallelograms.

77. The array of claim 60, wherein the micromirrors have sides that are about 35 to 55 degrees to the sides of the active area.

78. A projection system comprising a light source for providing an incident light beam, an array of movable reflective elements, and collection optics for projecting light from the array, wherein an image projected from the projection system will appear on a target as a rectangular image, with the image being formed of from thousands to millions of pixels, each pixel being in the shape of a concave polygon, a single non-rectangular parallelogram, or an assembly of non-rectangular parallelograms.

79. The projection system of claim 78, wherein each pixel in the projected image is a concave polygon having more than 4 sides and 4 angles.

80. The projection system of claim 79, wherein each pixel has a shape substantially the same as any of those illustrated in FIGS. 14-19.

81. The projection system of claim 78, where no pixel sides are parallel to at least two of the sides of the rectangular projected image.

82. The projection system of claim 78, wherein at least two pixel sides are non-parallel and non-perpendicular to the projected image sides, and wherein at least two pixel sides are parallel and perpendicular to projected image sides.

83. The projection system of claim 78, wherein at least one pixel side extends in a direction at an angle of from 35 to 85 degrees from one of the projected image sides.

84. The projection system of claim 83, wherein at least two pixel sides extend in a direction at an angle of from 40 to 55 degrees from at least one of the projected image sides.

85. A projection system comprising a light source, an array of movable micromirror elements, and collection optics, wherein each micromirror element in the array has a switching axis substantially parallel to at least one side of the active area of the array, and at an angle of from 35 to 60 degrees to one or more sides of the micromirror element.

86. A projection system comprising a light source and an array of movable micromirror elements, each micromirror element having a leading side that is non-perpendicular to the incident light beam, and non-perpendicular to any side of the active area, so as to achieve an increase of 2 to 10 times the contrast ratio compared to micromirror elements having perpendicular sides to the incident light beam.

87. A projection system comprising a light source, collection optics, and an array of movable micromirror elements, the projection system having a diffraction pattern substantially the same as that illustrated in FIG. 21C.

88. A projection system comprising a light source and a rectangular array of movable micromirrors, the micromirrors capable of moving between an on-state and an off-state and capable of reflecting light in the on-state to a predetermined spatial area, wherein the light source is disposed to direct light at a substantially 90 degree angle to at least one side of the rectangle defined by the array, and wherein substantially no diffracted light enters the predetermined spatial area when the micromirrors are in the off-state.

89. A method for projecting an image on a target comprising:

directing a light beam onto a rectangular array of micromirrors, the light beam directed to the leading side of the rectangular array at an angle within a range of 90 degrees plus or minus 40 degrees, and wherein the micromirrors in the array are shaped as polygons and positioned such that the light beam is incident on all of the polygonal sides at angles other than 90 degrees; and

projecting the light from the micromirrors onto a target so as to form an image thereon.

90. The method of claim 89, wherein the light beam is incident on the leading side of the rectangular array substantially perpendicularly.

91. An array of pivotable micromirrors, each micromirror having a pivot axis, and each micromirror having one or more elongated sides that extend at an angle of less than 45 degrees to the pivot axis.

92. The array of claim 91, wherein the angle is from 30 to 42.5 degrees.

93. An array of movable micromirrors, each micromirror having four or more sides, wherein two of the sides come together at an angle of less than 90 degrees.

94. The array of claim 93, wherein the angle is from 45 to 85 degrees.

95. A projection system comprising a light source, light collection optics and an array of micromirrors disposed to spatially modulate a light beam from the light source, the array formed on a substrate and constructed so that each micromirror is capable of being in a first position when not actuated, each micromirror being capable of movement to an on position that directs light to light collection optics for the array, and capable of movement in an opposite direction to an off position for directing light away from the light collection optics, both said on and off positions being different from said first position, and wherein the on position is at an angle relative to the first position different from the off position.

96. The projection system of claim 95, wherein the on position is between 0 and +30 degrees from the first position, and the off position is between 0 and −

30 degrees from the first position.

97. The projection system of claim 96, wherein the on position is from +10 to +30 degrees, and the off position is from −

1 to −

10 degrees.

98. The projection system of claim 95, wherein the on position is from +12 to +20 degrees from the first position, and the off position is between −

1 and −

12 degrees from the first position.

99. The projection system of claim 95 that is part of an array of micromirrors in a projection display.

100. The projection system of claim 95, wherein the micromirrors are disposed on a semiconductor or light transmissive substrate.

101. The projection system of claim 100, wherein the substrate is a silicon substrate having circuitry and electrodes for moving the micromirror.

102. The projection system of claim 101, wherein one electrode is provided for electrostatically moving the micromirror to an on position and another electrode is provided for electrostatically moving the micromirror to an off position relative to a non-deflected position.

103. The projection system of claim 95, wherein the on and off positions of the micromirrors are different from each other by more than 1 degree.

104. The projection system of claim 103, wherein the micromirrors are capable of rotating at least +12 degrees to the on position, and are capable of rotating in an opposite direction between −

4 to −

10 degrees.

105. The projection system of claim 104, wherein the on position is from +10 to +15 degrees from the first position and the off position is from −

2 to −

7 degrees relative to the first position, the on and off positions being tilted in opposite direction relative to the first position.

106. The projection system of claim 95, that a front or rear screen projection television or computer monitor.

107. The projection system of claim 95, wherein the micromirrors are constructed so as to rotate around an axis from said first position in order to arrive at said on or said off position.

108. The projection system of claim 107, wherein the micromirrors are constructed so as rotate around a single axis.

109. The projection system of claim 95, wherein the collection optics is a single lens or group of lenses for all the micromirrors.

110. The projection system of claim 95, wherein the micromirrors are digitally addressed.

111. The projection system of claim 110, wherein the micromirrors achieve grayscale by pulse width modulation.

112. The projection system of claim 95, further comprising a target upon which light from the collection optics is incident.

113. The projection system of claim 95, wherein the light source is an arc lamp.

114. The projection system of claim 95, wherein the on and off positions are defined by structure against which the micromirrors impinge.

115. The projection system of claim 95, further comprising a screen upon which the pattern of on and off micromirrors is incident.

116. The projection system of claim 95, further comprising a color filter for providing a series of sequential colors onto the micromirror array.

117. The projection system of claim 100, further comprising a device for improving the evenness of light distribution onto the array.

118. The projection system of claim 95, wherein the collection optics is a plurality of lenses disposed so as to project the pattern of light from the micromirror array onto a target.

119. The projection system of claim 102, further comprising one or more micromirrors or lenses for directing and focusing a cone of light onto the micromirror array.

120. The projection system of claim 95 that is a front or rear projection display.

121. The projection system of claim 95 that is a mask projector for maskless patterning of a light sensitive material.

122. The projection system of claim 105 that is a projector in a photolithography system.

123. The projection system of claim 95, wherein in the off position, each micromirror forms an angle of from −

2 to −

25 degrees relative to the substrate in the off position, and from +10 to +35 degrees relative to the substrate in the on position.

124. The projection system of claim 107, wherein the on and off positions are defined by the micromirrors abutting one and/or a second substrate or structure thereon.

125. The projection system of claim 95, wherein the micromirrors are capable of rotation in one direction relative to the substrate to an on position, and in an opposite direction relative to the substrate to an off position.

126. The projection system of claim 109, wherein the micromirrors are formed on the substrate adjacent circuitry and electrodes, at least two electrodes are disposed adjacent each micromirror, one electrode for electrostatically pulling the adjacent micromirror to an off position, and another electrode for electrostatically pulling the adjacent micromirror to an on position.

127. The projection system of claim 110, wherein the circuitry and electrodes are formed on the same substrate as the micromirrors.

128. The projection system of claim 110, wherein the circuitry and electrodes are formed on a second substrate that is bonded to said substrate.

129. The projection system of claim 110, further comprising additional electrodes for stopping movement of the adjacent micromirror when the micromirror arrives at the on or off position.

130. The projection system of claim 113, wherein the additional electrodes are at the same potential as the adjacent micromirror.

131. The projection system of claim 95, wherein the light source, micromirror array and collection optics are disposed to project an image onto a target.

132. The projection system of claim 115, wherein the target is a retina of a viewer, a photosensitive material, or a screen.

133. The projection system of claim 115, wherein all on micromirrors in the array are disposed so as to concurrently direct light through the collection optics.

134. The projection system of claim 95, wherein the micromirror array is a packaged micromirror array having a light transmissive window in the package to allow the light beam from the light source to be incident on the micromirror array, wherein the light transmissive window is not parallel to the substrate of the micromirror array.

135. The projection system of claim 134, wherein the light transmissive window is at an angle of from −

2 to −

15 degrees relative to the micromirror array substrate.

136. The projection system of claim 135, wherein the light transmissive window is at an angle from −

3 to −

10 degrees relative to the micromirror array substrate.

137. The projection system of claim 95, wherein:

the array of micromirrors is disposed in a rectangular shape, the micromirrors capable of rotation around a switching axis between the off-state and the on-state, the micromirrors corresponding to pixels in a viewed image;

the light source being disposed so as to direct light non-perpendicular to at least two sides of each micromirror, and parallel, when viewed as a top view of each micromirror, to at least two other sides of each micromirror.

138. The projection system of claim 137, wherein the light source directs light at an angle substantially perpendicular to the switching axes of the micromirrors.

139. The system of claim 137, further comprising a color separating element provided between the light source and the micromirror array.

140. The system of claim 137, wherein the light source is disposed to direct light at the micromirrors such that the light impinges on a leading side of each micromirror at an angle of from 100 to 150 degrees.

141. The system of claim 137, wherein the micromirrors comprise metal and a dielectric material.

142. The system of claim 141, wherein the dielectric material is a nitride, carbide or oxide of silicon.

143. The system of claim 95, wherein from 64,000 to about 6,000,000 micromirrors are provided in an area of from about 1 cm² to about 1 in².

144. The system of claim 143, further comprising a rectangular mask disposed on or above the micromirror array.

145. The system of claim 95, wherein the micromirror array comprises four corner active micromirrors which define a rectangle with four sides.

146. The system of claim 145, wherein the micromirrors comprise at least four elongated micromirror sides, one or more of the micromirror sides being neither parallel nor perpendicular to any side of the rectangle defined by the four corner active micromirrors.

147. The system of claim 146, wherein no micromirror side is parallel or perpendicular to any side of the micromirror rectangle array.

148. The system of claim 146, wherein at least two micromirror sides are neither parallel or perpendicular to the sides of the micromirror array rectangle, and wherein at least two micromirror sides are parallel to sides of the micromirror array rectangle.

149. The system of claim 95, wherein each micromirror comprises one or more hinges that extend in a direction at an angle between 0 and 90 degrees from the axis of rotation of the micromirror.

150. The system of claim 149, wherein the one or more hinges extend at an angle of about 45 degrees to the direction of the axis of rotation.

151. The system of claim 95, wherein each micromirror has a shape of a parallelogram or an assembly of parallelograms.

152. The system of claim 151, wherein each micromirror has a shape of an assembly of from 2 to 7 parallelograms.

153. The system of claim 152, wherein each micromirror has a shape of an assembly of from 2 to 4 parallelograms.

154. The projection system of claim 95, wherein the array of micromirrors has each micromirror corresponding to a pixel in a viewed image and having a shape of a concave polygon or one or more non-rectangular parallelograms.

155. The projection system of claim 154, wherein each micromirror has a shape of a non-rectangular parallelogram or an assembly of non-rectangular parallelograms side by side.

235. The projection system of claim 95 that is a front or rear projection display.

156. A method for spatially modulating a light beam, comprising directing a light beam from a light source to light collection optics via an array of micromirrors disposed to spatially modulate the light beam from the light source, the array formed on a substrate and each micromirror being in a first position when not modulated, modulating micromirrors in the array so that each micromirror moves to an on position that directs light to the light collection optics for the array, and moves to an off position for directing light away from the light collection optics, both said on and off positions being different from said first position, and wherein the on position is at a magnitude of an angle relative to the first position different from the magnitude of an angle when in the off position.

157. An optical micromechanical element formed on a substrate having an on position at a first magnitude of an angle relative to the substrate, having an off position at a second magnitude of an angle to the substrate, the first and second magnitudes being different, and having a third position substantially parallel to the substrate, both the on and off positions being defined by abutment of the optical micromechanical element against the substrate or against structure formed on said substrate.

158. The micromechanical element of claim 157, wherein landing electrodes are provided on the substrate against which the micromirror stops in the on and off positions.

159. The micromechanical element of claim 158, wherein one landing electrode is positioned higher relative to the substrate than another landing electrode.

160. The micromechanical element of claim 157, that is in a package, the package comprising a window that is at an angle to the substrate.

161. The micormechanical element of claim 160, wherein the package is a hermetic or partially hermetic package.

162. The micromechanical element of claim 160, further comprising a molecular scavenger in the package.

163. The micromechanical element of claim 160, further comprising a stiction reduction agent within the package.

164. The micromechanical element of claim 157, further comprising flexure hinges disposed in a gap between a plate of the micromirror element and the substrate.

165. The micromechanical element of claim 157, further comprising deflection electrodes for deflecting the element to the on or off position.

166. The micromechanical element of claim 165, wherein at least one deflection electrode is disposed for moving the element to the on position, and at least one deflection electrode is disposed for moving the element to the off position.

167. The micromechanical element of claim 157 that is a micromirror.

168. A method for modulating light, comprising:

reflecting light from an array of deflectable micromirrors disposed on a planar substrate;

said micromirrors tilted to either a first position or to a second position;

wherein the angle formed between said first position and the substrate, and the angle formed between said second position and the substrate, are substantially different.

169. A method for modulating light, comprising:

a light source, a planar light modulator array comprising a deflectable elements and collection optics,

wherein the elements in the array are selectively configured in at least two states,

wherein the first state elements direct the light from the light source through a first angle into the collection optics,

and in the second state elements direct the light from the light source through a second angle;

a third angle representing light that is reflected from the array as if it were a micromirrored surface.

wherein the difference between the first and third and second and third angles are substantially different.

170. A projection system, comprising:

a light source for providing a light beam;

a micromirror array comprising a plurality of micromirrors provided in a path of the light beam; and

collection optics disposed in a path of the light beam after the light beam is incident on the micromirror array and reflects off of the plurality of micromirrors as a pattern of on and off micromirrors in the array;

wherein the micromirror array comprises a substrate, the array of micromirrors being held on the substrate where each micromirror is capable of moving to an on position and an off position from a non-deflected position, wherein the on position is at a different angle than the off position relative to the non-deflected position.

171. A method for projecting an image onto a target, comprising:

directing a light beam from a light source onto a micromirror array;

modulating the micromirrors each to an on or off position, wherein in the on position, micromirrors direct light to collection optics disposed for receiving light from micromirrors in their on position, wherein the pattern of on and off micromirrors forms an image; and

wherein the position of the micromirrors in their on position is at a different magnitude of an angle compared to the magnitude of the angle of the micromirrors in their off position.

172. A method for spatially modulating a light beam, comprising directing a beam of light onto an array of micromirrors, the micromirrors capable of movement to a first or second position, wherein in the first position the micromirrors direct a portion of the beam of light incident thereon into a collection optic, and wherein the minimum distance between adjacent micromirrors when each in the second position is less than the minimum distance between the adjacent micromirrors when each is in the first position.

173. The method of claim 172, wherein the minimum distance is determined in a direction non-parallel to the axis of rotation of the micromirrors.

174. The method of claim 172, wherein the distance is between adjacent parallel micromirror edges that have moved due to rotation of the micromirrors to either the first or second position, and the minimum of the distance is a closest point between the parallel edges of the adjacent micromirrors.

175. A device comprising:

a substrate on which is formed a movable reflective or diffractive micromechanical device;

a package for holding the substrate with the movable micromechanical device;

wherein the package comprises an optically transmissive window that is non-parallel to the substrate.

176. The device of claim 175, wherein the micromechanical device is a light modulator array.

177. The device of claim 175, wherein the window is at an angle of from −

2 to −

15 degrees relative to the substrate.

178. The device of claim 177, wherein the window is at an angle of from −

3 to −

10 degrees relative to the substrate.

179. The device of claim 175, wherein the optically transmissive window is display quality glass.

180. The device of claim 175, further comprising bond wires on a first side for electrically connecting the substrate to the package.

181. The device of claim 180, wherein the optically transmissive window is further from the substrate at a point above the bond wires on the substrate than at an opposite end of the substrate.

182. The device of claim 175, wherein the package is a hermetic or partially hermetic package.

183. The device of claim 182, further comprising a molecular scavenger in the package.

184. The device of claim 175, wherein the micromechanical device is a micromirror array for spatially modulating a light beam.

185. The device of claim 184 that is disposed within a projection system.

186. The device of claim 184, wherein each micromirror of the array has an on and off state, wherein the on state is at a different magnitude of an angle relative to the substrate than the off state.

187. The device of claim 186, wherein each micromirror abuts against the substrate or structure on the substrate when in the on and off states.

188. The device of claim 186, wherein the on and off positions are greater than a magnitude of 0 degrees relative to the substrate but less than 45 degrees relative to the substrate.

189. The device of claim 188, wherein the on position is from +10 to +30 degrees and the off position is less than between 0 and −

10 degrees.

190. The device of claim 189, wherein the on position is from +12 to +20 degrees and the off position is less than between 0 and −

12 degrees.

191. The device of claim 184, wherein micromirrors in the micromirror array are disposed on a semiconductor or light transmissive substrate.

192. The device of claim 191, wherein the substrate is a silicon substrate having circuitry and electrodes thereon for moving micromirrors adjacent thereto.

193. The device of claim 186, wherein the on and off positions are defined by the micromirrors abutting against a substrate or structure thereon.

194. The device of claim 186, wherein the structure thereon are landing electrodes at the same potential as the micromirrors.

195. The device of claim 186, wherein the micromirrors in the array are constructed so as to be pivotable around an axis from a non-deflected position to the on or the off states.

196. The device of claim 186, wherein the micromirrors are digitally addressed.

197. The device of claim 186, wherein the micromirrors have the shape of a concave polygon.

198. The device of claim 186, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

199. The device of claim 184, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

200. A projection system, comprising:

a light source;

light collection optics;

a substrate on which is formed a movable reflective or diffractive micromechanical device;

a package for holding the substrate with the movable micromechanical device;

wherein the package comprises an optically transmissive window that is non-parallel to the substrate;

the packaged micromechanical device disposed in a path of a light beam from the light source for modulating light from the light beam, and the collection optics collecting the modulated light.

201. The projection system of claim 200, wherein the micromechanical device is a light modulator array.

202. The projection system of claim 200, wherein the window is at an angle of from −

2 to −

15 degrees relative to the substrate.

203. The projection system of claim 202, wherein the window is at an angle of from −

3 to −

10 degrees relative to the substrate.

204. The projection system of claim 200, wherein the optically transmissive window is display quality glass.

205. The projection system of claim 200, further comprising bond wires on a first side for electrically connecting the substrate to the package.

206. The projection system of claim 205, wherein the optically transmissive window is further from the substrate at a point above the bond wires on the substrate than at an opposite end of the substrate.

207. The projection system of claim 200, wherein the package is a hermetic or partially hermetic package.

208. The projection system of claim 207, further comprising a molecular scavenger in the package.

209. The projection system of claim 200, wherein the micromechanical device is a micromirror array for spatially modulating a light beam.

210. The projection system of claim 209, that is disposed within a projection system.

211. The projection system of claim 209, wherein each micromirror of the array has an on and off state, wherein the on state is at a different magnitude of an angle relative to the substrate than the off state.

212. The projection system of claim 211, wherein each micromirror abuts against the substrate or structure on the substrate when in the on and off states.

213. The projection system of claim 211, wherein movement to the on position is through an angle of greater than 0 but less than 30 degrees, and movement in the opposite direction to the off position is through an angle of between 0 and −

30 degrees.

214. The projection system of claim 213, wherein the on position is from +10 to +30 degrees and the off position is from 0 to −

10 degrees.

215. The projection system of claim 214, wherein the on position is from +12 to +20 degrees and the off position is from 0 to −

12 degrees.

216. The projection system of claim 209, wherein micromirrors in the micromirror array are disposed on a semiconductor or light transmissive substrate.

217. The projection system of claim 216, wherein the substrate is a silicon substrate having circuitry and electrodes thereon for moving micromirrors adjacent thereto.

218. The projection system of claim 211, wherein movement of the micromirrors in one direction to the on position relative to a non-deflected position is greater than 1 degree more than movement in the opposite direction of the micromirrors to the off position.

219. The projection system of claim 211, wherein the difference is more than 3 degrees.

220. The projection system of claim 211, wherein the micromirrors in the array are constructed so as to be pivotable around an axis from a non-deflected position to the on or the off states.

221. The projection system of claim 211, wherein the micromirrors are digitally addressed.

222. The projection system of claim 211, wherein the micromirrors have the shape of a concave polygon.

223. The projection system of claim 211, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

224. The projection system of claim 209, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

225. The projection system of claim 209, wherein the micromirrors are digitally addressed.

226. The projection system of claim 225, wherein the micromirrors achieve grayscale by pulse width modulation.

227. The projection system of claim 209, further comprising a target upon which light from the collection optics is incident.

228. The projection system of claim 209, wherein the light source is an arc lamp.

229. The projection system of claim 209, wherein the on and off positions are at angles greater than 3 degrees but less than 30 degrees from the substrate.

230. The projection system of claim 209, further comprising a screen upon which the pattern of on and off micromirrors is incident.

231. The projection system of claim 209, further comprising a color filter for providing a series of sequential colors onto the micromirror array.

232. The projection system of claim 214, further comprising a device for improving the evenness of light distribution onto the array.

233. The projection system of claim 209, wherein the collection optics is a plurality of lenses disposed so as to project the pattern of light from the micromirror array onto a target.

234. The projection system of claim 216, further comprising one or more micromirrors or lenses for directing and focusing a cone of light onto the micromirror array.

236. The projection system of claim 209, that is a mask projector for maskless patterning of a light sensitive material.

237. The projection system of claim 219, that is a projector in a photolithography system.

238. The projection system of claim 211, further comprising a target upon which an image of a pattern of on and off mirrors is incident.

239. The projection system of claim 200, wherein the micromechanical device is a micromirror array where each micromirror has substantially no micromirror edges perpendicular to the light beam from the light source.

240. A packaged MEMS device having a substrate with a micromechanical device thereon and a window in the package disposed at an angle to the substrate.

241. The projection system of claim 240, wherein the micromechanical device is a light modulator array.

242. The projection system of claim 240, wherein the window is at an angle of from −

2 to −

15 degrees relative to the substrate.

243. The projection system of claim 242, wherein the window is at an angle of from −

3 to −

10 degrees relative to the substrate.

244. The projection system of claim 240, wherein the optically transmissive window is display quality glass.

245. The projection system of claim 240, further comprising bond wires on a first side for electrically connecting the substrate to the package.

246. The projection system of claim 245, wherein the optically transmissive window is further from the substrate at a point above the bond wires on the substrate than at an opposite end of the substrate.

247. The projection system of claim 240, wherein the package is a hermetic or partially hermetic package.

248. The projection system of claim 247, further comprising a molecular scavenger in the package.

249. The projection system of claim 240, wherein the micromechanical device is a micromirror array for spatially modulating a light beam.

250. The projection system of claim 249, that is disposed within a projection system.

251. The projection system of claim 249, wherein each micromirror of the array has an on and off state, wherein the on state is at a different magnitude of an angle relative to the substrate than the off state.

252. The projection system of claim 251, wherein each micromirror abuts against the substrate or structure on the substrate when in the on and off states.

253. The projection system of claim 251, wherein the on and off positions are greater than a magnitude of 0 degrees relative to the substrate but less than 45 degrees relative to the substrate.

254. The projection system of claim 253, wherein the on position is from +10 to +30 degrees and the off position is from 0 to −

10 degrees.

255. The projection system of claim 254, wherein the on position is from +12 to +20 degrees and the off position is from 0 to −

12 degrees.

256. The projection system of claim 249, wherein micromirrors in the micromirror array are disposed on a semiconductor or light transmissive substrate.

257. The projection system of claim 256, wherein the substrate is a silicon substrate having circuitry and electrodes thereon for moving micromirrors adjacent thereto.

258. The projection system of claim 251, wherein movement of the micromirrors in one direction to the on position relative to a non-deflected position is greater than 1 degree more than movement in the opposite direction of the micromirrors to the off position.

259. The projection system of claim 251, wherein the difference is more than 3 degrees.

260. The projection system of claim 251, wherein the micromirrors in the array are constructed so as to be pivotable around an axis from a non-deflected position to the on or the off states.

261. The projection system of claim 251, wherein the micromirrors are digitally addressed.

262. The projection system of claim 251, wherein the micromirrors have the shape of a concave polygon.

263. The projection system of claim 251, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

264. The projection system of claim 249, wherein non-flexible portions of the micromirrors have substantially the shape of an assembly of one or more side by side parallelograms.

265. The projection system of claim 249, wherein the micromirrors are digitally addressed.

266. The projection system of claim 265, wherein the micromirrors achieve grayscale by pulse width modulation.

267. A projector comprising a light source, a packaged MEMS device having a substrate with a micromechanical device thereon and a window in the package disposed at an angle to the substrate, and collection optics disposed to receive light from the light source after modulation by the packaged MEMS device.

268. A method for making a micromirror, comprising:

providing a substrate;

depositing and patterning a first sacrificial layer on the substrate;

depositing at least one hinge layer on the sacrificial layer and patterning the at least one hinge layer to define at least one flexure hinge;

depositing and patterning a second sacrificial layer;

depositing at least one mirror layer on the second sacrificial layer and patterning the at least one mirror layer to form a mirror element; and

removing the first and second sacrificial layers so as to release the micromirror.

270. The method of claim 268, wherein the sacrificial layers are deposited by spin-on, sputtering or chemical vapor deposition.

271. The method of claim 270, wherein the at least one hinge layer and the at least one mirror layer are conductive layers deposited by chemical vapor deposition or sputtering.

269. The method of claim 269, wherein the substrate is a light transmissive or semiconductor substrate.

272. An optical micromechanical device, comprising:

a substrate;

a first post on the substrate;

a flexure hinge where a proximal end of flexure hinge is on the post;

a second post attached to a distal end of the flexure hinge; and

a plate attached to the second post.

273. The device of claim 272, wherein the device is formed by micromachining.

274. The device of claim 272, wherein the plate is a reflective and conductive micromirror.

275. The device of claim 274, wherein a plurality of flexure hinges connect the plate to the substrate, via a plurality of corresponding first and second posts.

276. A mirror array comprising:

a substrate;

an array of mirrors held on said substrate, each mirror held by a hinge to said substrate;

a plurality of electrodes formed proximate to each mirror in the array for deflecting a proximate mirror to one of only two different deflection angles depending upon a voltage being applied to one of the plurality of electrodes.

277. The mirror array of claim 276, further comprising a landing electrode held at the same potential as the mirrors in the array.

278. The mirror array of claim 277, wherein a landing electrode is disposed for a mirror on position and a mirror off position.

279. The mirror array of claim 276, wherein a voltage is applied to one electrode of the plurality of electrodes for electrostatically pulling an adjacent mirror to an on position, and a voltage is applied to another electrode of the plurality of electrodes for electrostatically pulling the adjacent mirror to an off position different from the on position.

280. A package for a micromechanical device comprising a bottom substrate for holding the micromechanical device and a top light transmissive substrate that is non-parallel to the bottom substrate.

281. The package of claim 280, capable of hermetic sealing.

282. The package of claim 281 comprising a getter and an agent for reducing stiction.

283. The package of claim 280, further comprising a micromechanical device disposed on the bottom substrate.

284. The package of claim 283, wherein the non-parallel light transmissive substrate is at an angle of from −

1 to 15 degrees relative to the bottom substrate.

285. The package of claim 284, further comprising bond wires connecting the micromechanical device to the bottom substrate.

286. The package of claim 280, further comprising a bond pad on the bottom substrate.

299. The projection system 95, wherein the first position is within +/−

1 degree of being parallel to the substrate.