Actuated deformable membrane mirror
First Claim
1. An actuator comprising:
- a first region of piezoelectric material;
a support structure; and
flexures attaching a perimeter of the region to the support structure.
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Abstract
Structures including piezoelectric actuators, actuator arrays, and deformable mirrors and processes for fabricating the structures are provided. The fabrication processes can manufacture arrays of actuators including piezoelectric materials using wafer-processing techniques. The actuators include piezoelectric layers sandwiched between electrodes that are mounted on flexures that provide electrical connections. The piezoelectric layers can be formed on sacrificial layers while flexures are formed in trenches or vias through the sacrificial layers. Removal of the sacrificial layers frees the piezoelectric layer and permits the piezoelectric layers to dish or warp when providing the actuator action. Alternative embodiments include actuators that are bimorphs or Rainbows.
43 Citations
31 Claims
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1. An actuator comprising:
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a first region of piezoelectric material;
a support structure; and
flexures attaching a perimeter of the region to the support structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An actuator comprising:
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a region comprising a first layer of piezoelectric material that is between a first electrode and a second electrode; and
a plurality of flexures attached to a perimeter of the region, wherein the perimeter of the region is unsupported except where the flexures attach to the region. - View Dependent Claims (16, 17, 18)
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19. A deformable mirror comprising:
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an array of piezoelectric actuators fabricated on a substrate; and
a mirror membrane attached to the array of piezoelectric actuators. - View Dependent Claims (20, 21, 22)
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23. A process for fabricating an actuator, comprising:
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forming a sacrificial layer on a substrate;
forming a trench in the sacrificial layer;
depositing a first conductive layer over the first insulating layer;
patterning the first conductive layer to form a first electrode overlying the sacrificial layer and a first conductive trace extending from the first electrode into the trench;
forming a first disk of piezoelectric material overlying the first electrode;
depositing a second conductive layer overlying the first disk and extending into the trench;
patterning the second conductive layer to form a second electrode overlying the first disk and a second conductive trace extending into the trench; and
etching the sacrificial layer from under the first electrode. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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30. A process for fabricating an actuator, comprising:
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forming traces on a substrate;
forming a first sacrificial layer overlying the electrical traces;
forming a first conductive plug and a second conductive plug through the first sacrificial layer, wherein the conductive plugs are electrically connected to the traces;
forming a first electrode overlying the first sacrificial layer, wherein the first electrode is electrically connected to the first conductive plug and electrically isolated from the second conductive plug;
forming a first disk of a piezoelectric material overlying the first electrode;
forming a second electrode on the first disk, wherein the second electrode is electrically connected to the second conductive plug and electrically isolated from the first conductive plug; and
removing the first sacrificial layer from under the first electrode. - View Dependent Claims (31)
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Specification