Apparatus and methods for the inspection of objects
First Claim
1. A system for inspecting electrical circuits comprising:
- a boundary identifier operative to generate a representation of boundaries of elements in an image of an electrical circuit which is under inspection; and
a defect identifier operative to receive said representation of boundaries of elements and to analyze at least some locations of at least some boundaries in said representation of boundaries of elements to identify defects in said electrical circuit.
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Abstract
This invention discloses a system and method for inspecting objects, the method including creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects.
A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.
80 Citations
27 Claims
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1. A system for inspecting electrical circuits comprising:
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a boundary identifier operative to generate a representation of boundaries of elements in an image of an electrical circuit which is under inspection; and
a defect identifier operative to receive said representation of boundaries of elements and to analyze at least some locations of at least some boundaries in said representation of boundaries of elements to identify defects in said electrical circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 19, 20)
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12. A method for inspecting electrical circuits comprising:
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generating a representation of boundaries of elements in an image of an electrical circuit; and
analyzing at least one of said boundaries in said representation of boundaries of elements to identify defects in said electrical circuit. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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21. A method of manufacturing an electrical circuit comprising:
acquiring an image of at least a portion of an electrical circuit and inspecting said image for defects in said electrical circuit, including;
generating a representation of boundaries of elements in the image; and
analyzing at least one of said boundaries in said representation of boundaries of elements to identify defects in said electrical circuit portion. - View Dependent Claims (22, 23, 24, 25, 26, 27)
Specification