METHODS AND SYSTEMS FOR ACTIVELY CONTROLLING MOVEMENT WITHIN MEMS STRUCTURES

• US 20040129076A1
• Filed: 01/06/2003
• Published: 07/08/2004
• Est. Priority Date: 01/06/2003
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Platt, William P.
• Granted Patent: US 6,817,244 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices is described. The MEMS devices also include a motor pickoff comb, a sense plate, and a motor drive comb for each proof mass. The method includes amplifying signals received from respective motor pickoff combs, inverting the amplified signal from one of the motor pickoff combs, and generating a difference signal between the inverted, amplified signal from one pickoff comb, and the non-inverted, amplified signal from the other pickoff comb. The method also includes inputting the difference signal into a control loop and generating motor drive signals for respective motor drive combs with the control loop.

Claims

1. A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices, the MEMS devices also including a motor pickoff comb, a sense plate, and a motor drive comb for each proof mass, said method comprising:

amplifying signals received from respective motor pickoff combs;

inverting the amplified signal from one of the motor pickoff combs;

generating a difference signal between the inverted, amplified signal from one pickoff comb, and the non-inverted, amplified signal from the other pickoff comb;

inputting the difference signal into a control loop; and

generating motor drive signals for respective motor drive combs with the control loop.

2. A method according to claim 1 further comprising rectifying and integrating the difference signal before it is input to the control loop.

3. A method according to claim 1 further comprising inputting the amplified signals from the motor pickoff combs into the control loop.

4. A method according to claim 1 further comprising inputting sense pickoff signals from the proof masses into the control loop.

5. A method according to claim 1 wherein generating motor drive signals comprises changing pulse shapes of motor drive signals based upon the difference signal.

6. A micro-electromechanical systems (MEMS) device comprising:

a substrate;

a plurality of motor drive combs attached to said substrate;

a plurality of motor pickoff combs attached to said substrate;

a plurality of proof masses, each proof mass suspended above said substrate and between one of said motor drive combs and one of said motor pickoff combs; and

a circuit configured to generate motor drive signals for said motor drive combs, said circuit configured to receive signals from said motor pickoff combs, generate a difference signal between the signals received from said motor pickoff combs, and utilize the difference signal to control amplitude and pulse shape of said motor drive signals in order to suppress common mode oscillation in said proof masses.

7. A MEMS device according to claim 6 wherein to generate said difference signal, said circuit comprises:

a gain stage for each said motor pickoff comb, said gain stages configured to amplify the signals from said motor pickoff combs;

an inverter configured to invert the signal from one of said motor pickoff combs; and

an amplifier configured to receive the inverted signal and a non-inverted signal, an output of said amplifier being the difference signal.

8. A MEMS device according to claim 7 wherein each said gain stage provides a substantially equal amount of gain.

9. A MEMS device according to claim 7 wherein said circuit further comprises:

a rectifier;

an integrator; and

a control loop, said rectifier configured to receive said difference signal, said integrator configured to receive an output from said rectifier, and output a rectified and integrated difference signal into said control loop, said control loop configured to control amplitude and pulse shape of said motor drive signals.

10. A MEMS device according to claim 9 wherein said control loop comprises inputs configured to receive signals from said motor pickoff combs.

11. A MEMS device according to claim 9 wherein said control loop comprises an input configured to receive sense pickoff signals from said proof masses.

12. A circuit for suppressing common mode oscillations in a micro-electromechanical systems (MEMS) device, the device including at least one motor pickoff comb which provides motor pickoff signals, said circuit comprising:

an amplifier circuit configured to generate a difference signal based upon the motor pickoff signals received from the motor pickoff combs; and

a control loop configured to receive the difference signal from said amplifier circuit, said control loop configured to control amplitude and pulse shape of motor drive signals output to the MEMS device at least partially based on the difference signal received.

13. A circuit according to claim 12 wherein said amplifier circuit comprises:

a first gain stage for a first motor pickoff signal;

a second gain stage for a second motor pickoff signal;

an inverter configured to invert the amplified motor pickoff signal from said first gain stage; and

an amplifier configured to receive an output from said inverter and an output from said second gain stage, an output of said amplifier being the difference signal.

14. A circuit according to claim 13 wherein said amplifier circuit comprises:

a rectifier; and

an integrator, said rectifier configured to receive the difference signal, said integrator configured to receive an output from said rectifier, and output a rectified and integrated difference signal to said control loop.

15. A circuit according to claim 13 wherein said control loop comprises inputs configured to receive signals from said first gain stage and said second gain stage.

16. A circuit according to claim 12 wherein said control loop comprises an input configured to receive sense pickoff signals from proof masses of the MEMS device.

17. A circuit according to claim 12 wherein said control loop comprises a processor programmed to control amplitude and pulse shape of motor drive signals output to the MEMS device at least partially based on the difference signal received.

18. A method for suppressing common mode oscillations between proof masses in micro-electromechanical systems (MEMS) devices, the devices also including motor drive combs and motor pickoff combs, said method comprising:

receiving motor pickoff signals from motor pickoff combs;

generating a difference signal from the received motor pickoff signals; and

controlling pulse shapes of motor drive signals applied to motor drive combs based upon the difference signal.

19. A method according to claim 18 wherein generating a difference signal from the received signals comprises:

amplifying a first motor pickoff signal;

amplifying a second motor pickoff signal;

inverting the amplified first motor pickoff signal; and

generating a difference signal between the inverted, amplified first motor pickoff signal and the amplified second motor pickoff signal;

20. A method according to claim 18 wherein controlling pulse shapes of motor drive signals comprises implementing a control loop configured to control amplitude and pulse shape of motor drive signals output to the MEMS device at least partially based on the generated difference signal.

21. A micro-electromechanical systems gyroscope configured to suppress common mode oscillation, said gyroscope comprising:

a substrate;

a plurality of motor drive combs attached to said substrate;

a plurality of motor pickoff combs attached to said substrate;

a plurality of proof masses, each said proof mass suspended above said substrate and between one of said motor drive combs and one of said motor pickoff combs;

an amplifier circuit configured to receive signals from said motor pickoff combs, and generate a difference signal between the signals received from said motor pickoff combs; and

a control loop configured to utilize the difference signal to control amplitude and pulse shape of motor drive signals output to said motor drive combs to suppress common mode oscillation in said proof masses.