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METHODS AND SYSTEMS FOR ACTIVELY CONTROLLING MOVEMENT WITHIN MEMS STRUCTURES

  • US 20040129076A1
  • Filed: 01/06/2003
  • Published: 07/08/2004
  • Est. Priority Date: 01/06/2003
  • Status: Active Grant
First Claim
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1. A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices, the MEMS devices also including a motor pickoff comb, a sense plate, and a motor drive comb for each proof mass, said method comprising:

  • amplifying signals received from respective motor pickoff combs;

    inverting the amplified signal from one of the motor pickoff combs;

    generating a difference signal between the inverted, amplified signal from one pickoff comb, and the non-inverted, amplified signal from the other pickoff comb;

    inputting the difference signal into a control loop; and

    generating motor drive signals for respective motor drive combs with the control loop.

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