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Apparatus and method for depositing material onto a substrate using a roll-to-roll mask

  • US 20040131761A1
  • Filed: 01/02/2003
  • Published: 07/08/2004
  • Est. Priority Date: 01/02/2003
  • Status: Active Grant
First Claim
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1. A system comprising:

  • a vacuum chamber;

    a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies a first mask strip having a plurality of different masks and a second take-up reel;

    a first deposition station configured to deposit material onto the first strip of substrate running between the first source reel and the first take-up reel, as defined by the first mask strip running between the second source reel and the second take-up reel; and

    a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the mask strip between the second source reel and the second take-up reel.

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