Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
First Claim
1. A system comprising:
- a vacuum chamber;
a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies a first mask strip having a plurality of different masks and a second take-up reel;
a first deposition station configured to deposit material onto the first strip of substrate running between the first source reel and the first take-up reel, as defined by the first mask strip running between the second source reel and the second take-up reel; and
a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the mask strip between the second source reel and the second take-up reel.
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Accused Products
Abstract
A battery-operated device provided on a thin-film battery and a method for making. Some embodiments provide a system that includes a vacuum chamber, a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies a first mask strip having a plurality of different masks and a second take-up reel, a first deposition station configured to deposit material onto the first strip of substrate running between the first source reel and the first take-up reel, as defined by the first mask strip running between the second source reel and the second take-up reel, and a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the mask strip between the second source reel and the second take-up reel.
157 Citations
30 Claims
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1. A system comprising:
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a vacuum chamber;
a plurality of pairs of source and take-up reels within the vacuum chamber, including a first source reel that supplies a first strip of substrate material and a first take-up reel, and a second source reel that supplies a first mask strip having a plurality of different masks and a second take-up reel;
a first deposition station configured to deposit material onto the first strip of substrate running between the first source reel and the first take-up reel, as defined by the first mask strip running between the second source reel and the second take-up reel; and
a controller operatively coupled to run the first strip of substrate between the first source reel and the first take-up reel at a first independent rate and tension, and to run the mask strip between the second source reel and the second take-up reel. - View Dependent Claims (2, 3, 4, 5)
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6. A method comprising:
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supplying a first strip of substrate material through a deposition station;
moving a first mask strip through the deposition station;
depositing a first layer of material from the deposition station onto the first substrate material in a pattern defined by a first area of the first mask strip; and
depositing a second layer of material from the deposition station onto the first substrate material in a pattern defined by a second area of the first mask strip. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A method of forming a device, the method comprising:
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providing a flexible substrate;
depositing a battery, including depositing an anode, a cathode, and an electrolyte separating the anode and cathode each defined by a different mask area on a mask strip;
depositing a wiring layer;
placing an electronic circuit onto the deposited layers, wherein the electronic circuit is operatively connected to the battery by the wiring layer;
depositing a pressure sensitive adhesive to allow peel-and-stick applications; and
covering the device. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A flexible peel-and-stick battery-operated device comprising:
a plurality of layers wherein the layers are held to one another as a single package, wherein the layers include;
a flexible substrate;
an electronic circuit;
a thin-film battery operatively coupled to the electronic circuit to provide power;
a radio frequency (RF) antenna operatively coupled to the electronic circuit; and
an adhesive layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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30. A system for making an RFID device, the system comprising:
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one or more supply reels that feed one or more source substrates;
one or more supply reels that feed one or more electronic circuits and an RF antenna;
one or more deposition stations that deposit layers onto the one or more substrates, wherein the layers include;
(i) layers to form a solid-state lithium-based battery, the battery layers including;
a) a cathode layer;
b) an electrolyte layer;
c) an anode layer;
(ii) a wiring layer to couple the battery to the electronic circuit layer, and to couple the RF antenna to the electronic circuit;
a movable mask strip having a plurality of different mask areas used for different deposition operations;
a supply reel that feeds a peel-and-stick adhesive layer; and
a vacuum chamber that contains the supply reels and the deposition station.
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Specification