Method for CVD process control for enhancing device performance
First Claim
1. A method implemented by one or more processors, comprising:
- receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates;
receiving a desired concentration profile of the species within a desired film; and
generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile.
0 Assignments
0 Petitions
Accused Products
Abstract
A method implemented by one or more processors, including receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates; receiving a desired concentration profile of the species within a desired film; and generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile. A computer-readable medium, system and apparatus are also disclosed.
25 Citations
84 Claims
-
1. A method implemented by one or more processors, comprising:
-
receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates;
receiving a desired concentration profile of the species within a desired film; and
generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A computer-readable medium carrying one or more sequences of one or more instructions, the one or more sequences of one or more instructions including instructions which, when executed by one or more processors, cause the one or more processors to perform:
-
receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates;
receiving a desired concentration profile of the species within a desired film; and
generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
-
-
41. A system comprising:
-
one or more processors;
a storage medium carrying one or more sequences of one or more instructions including instructions which, when executed by the one or more processors, cause the one or more processors to perform;
receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates;
receiving a desired concentration profile of the species within a desired film; and
generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62)
-
-
63. An apparatus suitable for implementation by one or more processors comprising:
-
means for receiving first information relating a plurality of flow rates of a species to corresponding concentrations of the species within films generated using the flow rates;
means for receiving a desired concentration profile of a species within a desired film; and
means for generating a plurality of process steps that, when performed, would form the desired film with the desired concentration profile by controlling the flow rate of the species based, in part, on the first information and the desired concentration profile, wherein a first concentration of the species at a first point in the desired concentration profile differs from a second concentration of the species at a second point in the desired concentration profile. - View Dependent Claims (64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84)
-
Specification