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Apparatus and method for isolating and measuring movement in a metrology apparatus

  • US 20040134264A1
  • Filed: 07/22/2003
  • Published: 07/15/2004
  • Est. Priority Date: 03/09/2001
  • Status: Active Grant
First Claim
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1. An assembly comprising:

  • an actuator with a longitudinal axis having a fixed end, and a free end configured to translate in three orthogonal directions with respect to said fixed end;

    a multiple bar linkage having first and second links mutually constrained to translate with respect to each other, and wherein said first link is fixed to a reference structure and said second link is constrained to translate in a direction generally parallel to the longitudinal axis of said actuator; and

    a sample holder supported by said linkage; and

    a coupling having first and second ends, said first end being fixed to said actuator proximate to its free end, and said second end being fixed to said second link, the coupling adapted to transmit displacement in a direction substantially parallel to the longitudinal axis of said actuator.

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