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Etching method for fabricating high quality optical fiber probe

  • US 20040134884A1
  • Filed: 01/10/2003
  • Published: 07/15/2004
  • Est. Priority Date: 01/10/2003
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • preparing a fiber to remove a portion of outer protective layers of one end section of the fiber and to form a flat end facet;

    forming a coating to cover at least the end section and to expose the flat end facet;

    shaping the coating to have a tapered profile which decreases towards the exposed flat end facet, where the tapered coating is operable to spatially regulate chemical etching of the fiber when the fiber is submerged into an etching liquid;

    immersing the coated end section of the fiber into the etching liquid to chemically etch the exposed flat end facet which is submerged in the liquid and is away from a meniscus interface between the fiber and the etching liquid; and

    after etching for a period to form a desired etched fiber tip, removing the fiber from the etching liquid to terminate the etching.

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