Non intrusive and dynamic method for measuring a distance or the variation thereof through dielectrics
First Claim
1. A method for the non-contact measurement of the distance and of the variation over time thereof separating the surface of a grounded conductive or semi-conductive component from the nearest surface of one or several parallel layers of solid dielectric substances closely but variably spaced from said component and facing it, said variable distance being filled with a compressible dielectric substance, comprising the steps of:
- positioning a capacitive sensor on the external surface of the external layer of said solid dielectric substances, said sensor being composed of a first and a second parallel superimposed conductive or semi-conductive plates electrically insulated from one another, and said plates being parallel to the parallel layers of dielectric substances;
feeding said first plate of said sensor a high frequency signal;
measuring the voltage and current values over time generated by said high frequency signal between the second plate of said sensor which is closest to the surface of said outer layer of solid dielectric substances and the facing surface of the conducting or semi-conducting component;
deducting by processing means, from the current values and variations, the values and variations over time of the distance separating the inner surface of the inner solid dielectric layer facing the surface of the conductive or semi-conductive component.
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Accused Products
Abstract
A non intrusive method and system for the dynamic measurement of a distance, or the variations over time thereof, constituting the thickness, or the variations thereof, of a thin compressible dielectric material located between one or several other closely spaced solid dielectric layers of constant thickness and a conductive or semi-conductive surface. This is achieved by positioning a capacitive sensor on the external layer of the dielectric material, the sensor being composed of two parallel plates electrically insulated from one another, feeding the first plate with a high frequency signal, measuring the voltage and current value over time generated by the high frequency signal between the plate of the sensor which is closest to the surface of the outer layer of dielectric material, and deducting the above distance or variations thereof.
25 Citations
7 Claims
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1. A method for the non-contact measurement of the distance and of the variation over time thereof separating the surface of a grounded conductive or semi-conductive component from the nearest surface of one or several parallel layers of solid dielectric substances closely but variably spaced from said component and facing it, said variable distance being filled with a compressible dielectric substance, comprising the steps of:
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positioning a capacitive sensor on the external surface of the external layer of said solid dielectric substances, said sensor being composed of a first and a second parallel superimposed conductive or semi-conductive plates electrically insulated from one another, and said plates being parallel to the parallel layers of dielectric substances;
feeding said first plate of said sensor a high frequency signal;
measuring the voltage and current values over time generated by said high frequency signal between the second plate of said sensor which is closest to the surface of said outer layer of solid dielectric substances and the facing surface of the conducting or semi-conducting component;
deducting by processing means, from the current values and variations, the values and variations over time of the distance separating the inner surface of the inner solid dielectric layer facing the surface of the conductive or semi-conductive component. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification