Mirror for an integrated device
First Claim
Patent Images
1. A mirror for an integrated device, comprising:
- a plurality of segments mounted on a substrate layer, wherein each segment includes;
(i) a reflective layer formed over a support layer; and
(ii) a support post attached between the substrate layer and the support layer.
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Abstract
A mirror for an optical MEMS device has a plurality of segments supported on a substrate layer. Each segment includes a support post, a support layer, and a reflective layer formed over the support layer. The reflective layers of the plurality of segments form the reflective surface of the mirror. Due to the relatively small lateral dimensions of the segments, the mirror has a smaller thermal bow than prior art mirrors. The bow can be controlled, e.g., by appropriately choosing the number of segments and the layer thicknesses.
108 Citations
20 Claims
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1. A mirror for an integrated device, comprising:
a plurality of segments mounted on a substrate layer, wherein each segment includes;
(i) a reflective layer formed over a support layer; and
(ii) a support post attached between the substrate layer and the support layer. - View Dependent Claims (2, 3, 4, 5)
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6. An integrated device, comprising a mirror, wherein:
the mirror includes a plurality of segments mounted on a substrate layer; and
each segment includes;
(i) a reflective layer formed over a support layer; and
(ii) a support post attached between the substrate layer and the support layer. - View Dependent Claims (7, 8, 9, 10)
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11. A method of fabricating a mirror for an integrated device, comprising:
forming a plurality of segments on a substrate layer, wherein each segment includes;
(i) a reflective layer formed over a support layer; and
(ii) a support post attached between the substrate layer and the support layer. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
Specification