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Aqueous phosphoric acid compositions for cleaning semiconductor devices

  • US 20040137736A1
  • Filed: 10/21/2003
  • Published: 07/15/2004
  • Est. Priority Date: 10/22/2002
  • Status: Active Grant
First Claim
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1. An aqueous semiconductor cleaning solution comprising:

  • at least about 75% by weight water;

    from about 0.5% to about 10% by weight phosphoric acid;

    at least one alkaline compound selected from the group consisting of;

    a quaternary ammonium hydroxide;

    a hydroxylamine derivative having the structural formula;

    wherein R3 is hydrogen or a linear, branched, or cyclic hydrocarbon containing from 1 to 7 carbon atoms; and

    wherein X and Y are, independently, hydrogen or a linear, branched, or cyclic hydrocarbon containing from 1 to 7 carbon atoms, or wherein X and Y are linked together form a nitrogen-containing heterocyclic C4-C7 ring; and

    a mixture thereof; and

    optionally one or more other acid compounds, one or more fluoride-containing compounds, and/or one or more alkanolamines having the structural formula;

    wherein R1, R1

    , R2, R2

    , and R3 are, independently in each case, hydrogen or a linear, branched, or cyclic hydrocarbon containing from 1 to 7 carbon atoms;

    wherein Z is a group having the formula -(-Q-CR1R1

    -CR2R2

    -)m-, such that m is a whole number from 0 to 3 (i.e., when m=0, there is no atom between the -CR2 R2

    - group and the -OR3 group in the formula above), R1, R1

    , R2, and R2

    +0'"'"'MAY be independently defined in each repeat unit, if m>

    1, within the parameters set forth for these moieties above, and Q may be independently defined in each repeat unit, if m>

    1, each Q being independently either -O- or -NR3-; and

    wherein X and Y are, independently in each case, hydrogen, a C1-C7 linear, branched, or cyclic hydrocarbon, or a group having the formula -CR1R1

    -CR2 R2

    -Z-F, with F being either -O-R3 or -NR3R4, where R4 is defined similarly to R1, R1

    , R2, R2

    , and R3 above and with Z, R1, R1

    , R2, R2

    , and R3 defined as above, or wherein X and Y are linked together form a nitrogen-containing heterocyclic C4-C7 ring.

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