Fabrication system, light-emitting device and fabricating method of organic compound-containing layer

• US 20040139914A1
• Filed: 08/29/2003
• Published: 07/22/2004
• Est. Priority Date: 08/30/2002
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki, Yamazaki, Shunpei, Murakami, Masakazu
• Granted Patent: US 7,378,133 B2
• Time in Patent Office: Days
• US Class Current: 118/719
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/225 Oblique incidence of vaporised material on substrate
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/246 Replenishment of source material
• CPC Class Codes: C23C 14/542 Controlling the film thickness or evaporation rate
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: H05B 33/10 Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
• CPC Class Codes: H05B 33/14 characterised by the chemical or physical composition or the arrangement of the electroluminescent material , or by the simultaneous addition of the electroluminescent material in or onto the light source
• CPC Class Codes: H10K 30/865 Intermediate layers comprising a mixture of materials of the adjoining active layers
• CPC Class Codes: H10K 50/11 characterised by the electroluminescent [EL] layers
• CPC Class Codes: H10K 50/14 Carrier transporting layers
• CPC Class Codes: H10K 50/8445 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: H10K 50/846 comprising getter material or desiccants
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/164 using vacuum deposition

Abstract

The present invention provides a vapor deposition system for a film forming systems that promote an efficiency of utilizing an EL material and is excellent in uniformity or throughput of forming an EL layer and a vapor deposition method. According to the present invention, vapor deposition is carried out in a deposition chamber by moving an evaporation source holder 903 on which six containers 911 filled with an evaporation material are set at a certain pitch with respect to the substrate. The evaporation holder 903 is transported from an installation chamber 905 by a transport mechanism 902b. A heater is provided in a turntable 907. Throughput can be improved by heating the evaporation holder 903 in advance of transporting containers into the evaporation holder 903.

Claims

1. A fabrication system comprising:

a load chamber;

a transport chamber coupled with the load chamber;

plural deposition chambers coupled with the transport chamber; and

an installation chamber coupled with each of the plural deposition chambers;

wherein each of the plural deposition chambers is coupled with a first vacuum exhaust treatment chamber for evacuating inside of each of the plural deposition chambers;

wherein each of the plural deposition chambers comprises;

an alignment means performing a positional alignment between a mask and a substrate;

a substrate holding means; and

means for moving an evaporation source holder, the evaporation source holder having at least one container in which an evaporation material has been sealed;

means for heating the container; and

a shutter provided over the container;

wherein the installation chamber is coupled with a second vacuum exhaust treatment chamber for evacuating an inside of the installation chamber; and

wherein the installation chamber comprises

means for heating a container; and

means for carrying the container to the evaporation source holder in the deposition chamber.

2. A fabrication system according to claim 1,

wherein plural flat sheet heaters are disposed in the carrier chamber, said plural flat sheet heaters being overlapped and spaced;

and

wherein a treatment chamber capable of vacuum-heating plural substrates is coupled with the carrier chamber.

3. A fabrication system according to claim 1,

wherein means for moving the evaporation source holder has functions of moving the evaporation source holder in an X-direction at a certain pitch and moving the same in a Y-direction at a certain pitch.

4. A fabrication system according to claim 1,

wherein the number of said container is more than six.

5. A fabrication system according to claim 1, further comprising a tilt regulating screw provided on the evaporation source holder.

6. A fabrication system according to claim 1,

wherein said load chamber is a delivery chamber.

7. A fabrication system comprising:

a load chamber;

a carrier chamber coupled with the load chamber;

plural deposition chambers coupled with the carrier chamber; and

an installation chamber coupled with each of the deposition chambers;

wherein each of the plural deposition chambers is coupled with a first vacuum exhaust treatment chamber for evacuating inside of each of the deposition chambers;

wherein each of the plural deposition chambers comprises;

an alignment means performing a positional alignment between a mask and a substrate;

a substrate holding means;

means for moving an evaporation source holder;

the evaporation source holder having at least one container in which an evaporation material has been sealed;

means for heating the container; and

means for cooling the container by floating the container from the evaporation source holder;

wherein the installation chamber is coupled with a second vacuum exhaust treatment chamber for evacuating an inside of the installation chamber; and

wherein the installation chamber comprises;

means for heating a container; and

means for carrying the container to the evaporation source holder in the deposition chamber.

8. A fabrication system according to claim 7,

wherein plural flat sheet heaters are disposed in the carrier chamber, said plural flat sheet heaters being overlapped and spaced;

and

wherein a treatment chamber capable of vacuum-heating plural substrates is coupled with the carrier chamber.

9. A fabrication system according to claim 7,

wherein means for moving the evaporation source holder has functions of moving the evaporation source holder in an X-direction at a certain pitch and moving the same in a Y-direction at a certain pitch.

10. A fabrication system according to claim 7,

wherein the number of said container is more than six.

11. A fabrication system according to claim 7,

further comprising a tilt regulating screw provided on the evaporation source holder.

12. A fabrication system according to claim 7,

wherein said load chamber is a delivery chamber.

13. A method of forming a layer containing an organic compound, said method comprising the steps of:

installing a container in which a material containing the organic compound has been filled to an installation chamber;

vacuum-exhausting the installation chamber;

heating the container to a temperature T in the installation chamber;

carrying the heated container to an evaporation holder previously heated to the temperature T;

transporting a substrate into a deposition chamber;

carrying out vapor deposition to the substrate by making a degree of vacuum in the deposition chamber higher than that in the installation chamber while maintaining the container to the temperature T; and

carrying the substrate.

14. A light emitting device comprising a light emitting element, said light emitting element comprising a cathode, a lamination layer containing an organic compound contacting with the cathode, and an anode contacting with the lamination layer containing the organic compound over a substrate having an insulation surface;

wherein end portions of at least two layers in the lamination layer containing the organic compound flush with each other; and

wherein the light emitting element is covered with a lamination layer of a first inorganic insulation film, a film having a moisture-absorption characteristic and a transparency, and a second inorganic insulation film.

15. A light emitting device according to claim 14,

wherein the film having the moisture-absorption characteristic and the transparency is smaller in its stress than the first inorganic insulating film or the second inorganic insulating film.

16. A light emitting device according to claim 14,

wherein the first inorganic insulating film or the second inorganic insulating film is a silicon nitride film, a silicon oxide film, an oxidized silicon nitride film, a DLC film, a CN film or a lamination film of these.

17. A light emitting device according to claim 14,

wherein the first inorganic insulating film or the second inorganic insulating film is a silicon nitride film formed by a high frequency sputtering method in which silicon is made a target.

18. A light emitting device according to claim 14,

wherein over a first substrate there are provided a light emitting element and a TFT connected to the light emitting element.

19. A light emitting device according to claim 14,

wherein the film having the moisture-absorption characteristic and the transparency is a material film obtained by a vapor deposition.

20. A light emitting device according to claim 14,

wherein the film having a moisture-absorption characteristic and a transparency is formed of the same material as at least one layer in the lamination layer interposed between the cathode and the anode.

21. A light emitting device according to claim 14,

wherein the light emitting device is selected from the group consisting of a video camera, a digital camera, a display, a car navigation, a personal computer or a portable information terminal.

22. A light emitting device comprising a light emitting element, said light emitting element comprising a cathode, a lamination layer containing an organic compound contacting with the cathode, and an anode contacting with the lamination layer containing the organic compound over a substrate having an insulation surface;

wherein an upper layer is provided so as to cover an end portion of a lower layer in the lamination layer containing the organic compound; and

wherein the light emitting element is covered with a lamination layer of a first inorganic insulation film, a film having a moisture-absorption characteristic and a transparency, and a second inorganic insulation film.

23. A light emitting device according to claim 22,

wherein the film having the moisture-absorption characteristic and the transparency is smaller in its stress than the first inorganic insulating film or the second inorganic insulating film.

24. A light emitting device according to claim 22,

wherein the first inorganic insulating film or the second inorganic insulating film is a silicon nitride film, a silicon oxide film, an oxidized silicon nitride film, a DLC film, a CN film or a lamination film of these.

25. A light emitting device according to claim 22,

wherein the first inorganic insulating film or the second inorganic insulating insulating film is a silicon nitride film formed by a high frequency sputtering method in which silicon is made a target.

26. A light emitting device according to claim 22,

wherein over a first substrate there are provided a light emitting element and a TFT connected to the light emitting element.

27. A light emitting device according to claim 22,

wherein the film having the moisture-absorption characteristic and the transparency is a material film obtained by a vapor deposition.

28. A light emitting device according to claim 22,

wherein the film having a moisture-absorption characteristic and a transparency is formed of the same material as at least one layer in the lamination layer interposed between the cathode and the anode.

29. A light emitting device according to claim 22,

wherein the light emitting device is selected from the group consisting of a video camera, a digital camera, a display, a car navigation, a personal computer or a portable information terminal.

30. A fabrication system comprising:

a load chamber;

a transport chamber coupled with the load chamber;

plural deposition chambers coupled with the transport chamber; and

an installation chamber coupled with each of the plural deposition chambers;

wherein each of the plural deposition chambers is coupled with a first vacuum exhaust treatment chamber for evacuating inside of each of the deposition chambers and;

wherein each of the plural deposition chambers comprises;

a CCD camera and a stopper performing a positional alignment between a mask and a substrate;

a frame;

a stage for moving an evaporation source holder, the stage having at least one of container in which an evaporation material has been sealed;

a heater for heating the container, and

a shutter provided over the container;

wherein the installation chamber is coupled with a second vacuum exhaust treatment chamber for evacuating an inside of the installation chamber; and

wherein the installation chamber comprises a heater for heating a container; and

an arm for carrying the container to the evaporation source holder in the deposition chamber.

31. A light emitting device according to claim 30,

wherein the number of said container is more than six.

32. A light emitting device according to claim 30,

further comprising a tilt regulating screw provided on the evaporation source holder.

33. A light emitting device according to claim 30,

wherein said load chamber is a delivery chamber.

34. A fabrication system comprising:

a load chamber;

a carrier chamber coupled with the load chamber;

plural deposition chambers coupled with the carrier chamber; and

an installation chamber coupled with the plural deposition chambers;

wherein the plural deposition chambers are coupled with a first vacuum exhaust treatment chamber for evacuating inside of each of the deposition chambers; and

wherein the plural deposition chambers comprise;

a CCD camera and a stopper performing a positional alignment between a mask and a substrate,

a frame,

a stage for moving an evaporation source holder, the evaporation source holder having at least one of container in which an evaporation material has been sealed,

a heater for heating the container; and

a lifting pin for cooling the container by floating the container from the evaporation source holder; and

wherein the installation chamber is coupled with a second vacuum exhaust treatment chamber for evacuating an inside of the installation chamber; and

wherein the installation chamber comprises a heater for heating a container;

and an arm for carrying the container to the evaporation source holder in the deposition chamber.

35. A light emitting device according to claim 34,

wherein the number of said container is more than six.

36. A light emitting device according to claim 34,

further comprising a tilt regulating screw provided on the evaporation source holder.

37. A light emitting device according to claim 35,

wherein said load chamber is a delivery chamber.