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Generating electrons with an activated photocathode

  • US 20040140432A1
  • Filed: 10/29/2003
  • Published: 07/22/2004
  • Est. Priority Date: 10/10/2002
  • Status: Active Grant
First Claim
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1. An electron beam apparatus comprising:

  • (a) a beam source to generate a radiation beam;

    (b) a photocathode comprising an electron-emitting material composed of activated alkali halide having a minimum electron emission energy level that is less than 75% the minimum electron emission energy level of the un-activated alkali halide, whereby the electron-emitting material emits electrons when the radiation beam is incident thereon;

    (c) electron beam elements to form an electron beam from the emitted electrons and direct the electron beam onto a workpiece; and

    (d) a support to support the workpiece.

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