3D MEMS/MOEMS package
First Claim
Patent Images
1. A packaged MEMS or MOEMS device comprising:
- a first substrate having on a first surface thereof at least one MEMS or MOEMS structure; and
a second substrate opposing and spaced from said first surface of said first substrate, having at least one MEMS or MOEMS structure on a first surface thereof opposing said first surface of said first substrate and said second substrate being bonded to said first surface of said first substrate.
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Abstract
Two substrates each carrying MEMS or MOEMS structures are bonded face to face and interconnected to form a compact surface-mountable package.
29 Citations
14 Claims
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1. A packaged MEMS or MOEMS device comprising:
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a first substrate having on a first surface thereof at least one MEMS or MOEMS structure; and
a second substrate opposing and spaced from said first surface of said first substrate, having at least one MEMS or MOEMS structure on a first surface thereof opposing said first surface of said first substrate and said second substrate being bonded to said first surface of said first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of packaging a plurality of MEMS or MOEMS device provided on respective first surfaces of a first and a second substrate, the method comprising the step of:
bonding said second substrate to said first substrate in a spaced apart relationship so that said respective first surfaces oppose each other. - View Dependent Claims (10, 11, 12, 13, 14)
Specification