×

Optimization method of aperture type of projection aligner

  • US 20040141167A1
  • Filed: 09/30/2003
  • Published: 07/22/2004
  • Est. Priority Date: 10/01/2002
  • Status: Active Grant
First Claim
Patent Images

1. A method of optimizing a shape of an aperture comprising:

  • dividing an effective light source into a plurality of minute areas having same shape and size;

    providing one point light source at a center of each of the divided minute areas;

    obtaining a normalized image light intensity slope on a wafer in consideration of a focus variation of a projection aligner for a plurality of patterns at each of the point light sources;

    using the normalized image light intensity slope of a light intensity as an index, which is related to an exposure amount variation of the projection aligner by one dimensional function;

    selecting a common opening for the shape of the aperture that is optimized for each of the patterns; and

    making the common opening into an optimum shape of the aperture for the patterns.

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×