Compensation of refractivity perturbations in an interferometer path
First Claim
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1. A method, comprising:
- directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object;
directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object; and
determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase.
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Abstract
In general, in one aspect, the invention features a method that includes directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object, directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object, and determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase.
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Citations
49 Claims
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1. A method, comprising:
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directing a first measurement beam along a first path contacting a measurement object to determine a first interferometric phase related to a position of a measurement object;
directing a second measurement beam along a second path contacting the measurement object to determine an second interferometric phase related to the position of the measurement object; and
determining a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 41, 42, 43, 44, 45, 46, 49)
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26. An apparatus, comprising:
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an interferometry system which during operation directs a first measurement beam along a first path contacting a measurement object and directs a second measurement beam along a second path contacting the measurement object; and
an electronic controller which during operation determines a first and second interferometric phase related to a position of the measurement object based on the first and second measurement beams, respectively, and determines a contribution to the first interferometric phase due to perturbations in refractivity along the first path based on the second interferometric phase. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 47, 48)
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Specification