Methods and systems for exchanging messages in a controller for a substrate processing system

• US 20040142563A1
• Filed: 01/16/2003
• Published: 07/22/2004
• Est. Priority Date: 01/16/2003
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Karuppiah, Lakshmanan, Fontarensky, Pierre
• Application Number:
  US10/346,398
• Publication Number:
  US 20040142563A1
• Time in Patent Office: Days
• US Class Current: 438/689
• CPC Class Codes: B24B 37/04 designed for working plane surfaces
• CPC Class Codes: B24B 49/00 Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation B24B33/06, B24B37/005 take precedence; if applicable to other machine tools, B23Q15/00 - B23Q17/00 take precedence
• CPC Class Codes: G05B 2219/33209 Protocol, mailbox, email, mail system
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

In a substrate processing system, a mailbox associated with at least one of a first process and a first thread is locked to prevent access to the mailbox by messages other than a first message from at least one of a second process and a second thread. The first message from the at least one of the second process and the second thread is placed in the mailbox, a message counter in incremented, and the mailbox is unlocked to allow access to the mailbox by messages other than the first message.

Claims

1. A method for controlling operations in a substrate processing system, comprising:

running on a computer a plurality of processes that control operations of the substrate processing system;

locking a mailbox associated with at least one of a first process and a first thread to prevent access to the mailbox by messages other than a first message from at least one of a second process and a second thread;

placing the first message from the at least one of the second process and the second thread in the mailbox;

incrementing a message counter; and

unlocking the mailbox to allow access to the mailbox by messages other than the first message.

2. The method of claim 1, wherein the message counter comprises a counting semaphore.

3. The method of claim 1, wherein locking the message queue comprises changing a value in a binary semaphore.

4. The method of claim 1, further comprising creating the message queue and associating it with the at least one of the first process and the first thread.

5. The method of claim 1, further comprising at least one of the first process and the first thread acting on the first message.

6. The method of claim 1, wherein placing the first message in the mailbox comprises placing the first message in a memory mapped file.

7. A method for controlling operations in an integrated substrate polishing and cleaning system, comprising:

running on a computer a plurality of processes that control operations of the an integrated substrate polishing and cleaning system;

locking a mailbox associated with at least one of a first process and a first thread to prevent access to the mailbox by messages other than a message from at least one of a second process and a second thread;

placing the message to the at least one of the first process and the first thread from at least one of a second process and a second thread in the mailbox;

incrementing a message counter;

unlocking the mailbox to allow access to the mailbox by messages other than the first message;

locking the mailbox associated with the at least one of the first process and the first thread;

retrieving the message from the mailbox;

decrementing the message counter; and

unlocking the mailbox.

8. The method of claim 7, wherein retrieving the message from the mailbox comprises retrieving the message based on a FIFO retrieval process.

9. The method of claim 7, further comprising receiving in the first process or thread a signal from the message counter that a message is available in the mailbox.

10. The method of claim 7, further comprising checking if another message is available after decrementing the message counter until the message counter indicates that there are no more messages, and reading the next available message after each successful check.

11. A system for exchanging messages between at least one of processes and threads in a substrate processing system, comprising:

a plurality of processes for processing a substrate, each of the processes comprising at least one thread; and

a message system including

at least one mailbox associated with at least one of a first process and a first thread to store messages from at least one of other processes and other threads,

a locking system for each mailbox to block access to the mailbox when a message operation is being performed on the mailbox, and

a counter for each mailbox to monitor the number of messages in the mailbox,

wherein the message operation comprises one of placing a message in the mailbox and reading a message from the mailbox.

12. The system of claim 11, wherein the mailbox comprises a memory mapping file to store the messages.

13. The system of claim 11, wherein the memory mapping file comprises a circular buffer.

14. The system of claim 11, wherein the locking system comprises a binary semaphore.

15. The system of claim 11, wherein the counter comprises a counting semaphore.

16. The system of claim 11, wherein the plurality of processes comprises at least one of a polishing process, a cleaning process, a particle monitoring process, a defect monitoring process, and a substrate transporting process.

17. A method of communicating between threads in a multi-thread system, the method comprising:

transmitting a locking command from a first thread to lock a mailbox from access during a message operation, the mailbox for storing messages directed to an associated thread wherein the associated thread performs at least one action in response to each message in the mailbox;

performing a message operation on the mailbox;

updating a message counter; and

releasing the mailbox.

18. The method of claim 17, wherein the message operation comprises one of placing a message in the mailbox and retrieving a message from the mailbox.

19. The method of claim 17, further comprising creating the mailbox.

20. The method of claim 17, wherein the message operation is performed by the first thread and comprises placing a message in the mailbox, the method further comprising performing a second message operation by a second thread, wherein the second message operation comprises retrieving the message.

21. The method of claim 17, further comprising acting on the message.

22. The method of claim 17, wherein the message queue is associated with a second thread.

23. The method of claim 17, wherein locking the message queue comprises locking a binary semaphore.

24. The method of claim 17, wherein updating the message counter comprises updating a counting semaphore.