Microdevice with movable microplatform and process for making thereof
First Claim
1. A process for making a microdevice (1), comprising the steps of:
- a) providing a base member;
b) selectively electroforming at least one support member (4) for supporting a microplatform (2) with respect to the base member;
c) selectively electroforming the microplatform (2); and
d) forming at least one flexible hinge member (3) for hingedly connecting the microplatform (2) to said at least one support member (4) and allowing relative movement of the microplatform (2) with respect to said at least one support member (4).
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Accused Products
Abstract
A process for making a microdevice that includes the steps of providing a base member and selectively electroforming a support member for supporting a microplatform with respect to the base member. The process also includes the steps of selectively electroforming the microplatform and forming a flexible hinge member for hingedly connecting the microplatform to the support member and allowing relative movement of the microplatform with respect to the support member. This microdevice, when compared to prior art devices, can have improved mechanical strength, rigidity, low deformation, and high planarity.
24 Citations
20 Claims
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1. A process for making a microdevice (1), comprising the steps of:
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a) providing a base member;
b) selectively electroforming at least one support member (4) for supporting a microplatform (2) with respect to the base member;
c) selectively electroforming the microplatform (2); and
d) forming at least one flexible hinge member (3) for hingedly connecting the microplatform (2) to said at least one support member (4) and allowing relative movement of the microplatform (2) with respect to said at least one support member (4). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A microdevice (1) comprising:
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a base member;
at least one support member (4) mountably connected to the base member, said at least one support member (4) being selectively electroformed according to a selective electroforming process;
at least one hinge member (3) mountably connected to said at least one support member (4); and
a microplatform (2) hingedly connected to said at least one hinge member (3) for allowing relative movement of the microplatform (2) with respect to said at least one support member (4), the microplatform (2) being selectively electroformed according to a selective electroforming process. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification