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Building control system using integrated MEMS devices

  • US 20040144849A1
  • Filed: 09/26/2003
  • Published: 07/29/2004
  • Est. Priority Date: 01/28/2003
  • Status: Abandoned Application
First Claim
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1. An apparatus for use in a building system, the apparatus comprising:

  • at least one microelectromechanical (MEMs) sensor device operable to generate a process value;

    a processing circuit operable convert the process value to an output digital signal configured to be communicated to another element of a building automation system, the building automation system including one or more devices that are operable to generate a control output based on set point information and process value information from one or more sensors; and

    wherein the at least one MEMs sensor device and the processing circuit are integrated onto a first substrate.

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