×

Micro-fabricated device with thermoelectric device and method of making

  • US 20040145049A1
  • Filed: 01/29/2003
  • Published: 07/29/2004
  • Est. Priority Date: 01/29/2003
  • Status: Active Grant
First Claim
Patent Images

1. A micro-fabricated device, comprising a support structure including an aperture formed therein;

  • a device substrate disposed within said aperture; and

    a thermally isolating structure thermally coupling said device substrate to said support structure, said thermally isolating structure comprising;

    at least one n-doped region disposed on or in said thermally isolating structure, at least one p-doped region disposed on or in thermally isolating structure separated from said at least one n-doped region, and an electrical interconnect connecting said at least one n-doped region and said at least one p-doped region, whereby an integrated thermoelectric device is formed.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×