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Reflective spatial light modulator

  • US 20040145822A1
  • Filed: 01/13/2004
  • Published: 07/29/2004
  • Est. Priority Date: 06/19/2002
  • Status: Active Grant
First Claim
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1. A micro mirror comprising:

  • a mirror plate;

    a spacer support frame;

    a hinge connected to the spacer support frame and the mirror plate for allowing the mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge; and

    wherein each of the mirror plate, the spacer support frame, and the hinge are fabricated from a single continuous piece of material.

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