Micro-fabricated device and method of making
First Claim
Patent Images
1. A micro-fabricated device, comprising a support structure;
- a device substrate disposed a distance G from said support structure; and
at least one thermally isolating structure having a characteristic length, said at least one thermally isolating structure thermally coupled to said device substrate and said support structure, wherein said characteristic length is greater than said distance G.
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Abstract
A micro-fabricated device, includes a support structure and a device substrate disposed a distance G from the support structure. The micro-fabricated device further includes one or more thermally isolating structures that have a characteristic length, and the one or more thermally isolating structures is thermally coupled to the device substrate and the support structure. The characteristic length is greater than said distance G.
259 Citations
80 Claims
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1. A micro-fabricated device, comprising
a support structure; -
a device substrate disposed a distance G from said support structure; and
at least one thermally isolating structure having a characteristic length, said at least one thermally isolating structure thermally coupled to said device substrate and said support structure, wherein said characteristic length is greater than said distance G. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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43. A micro-fabricated device, comprising:
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a device substrate;
means to support said device substrate; and
means to reduce thermal conduction between said device substrate and said support structure. - View Dependent Claims (44, 45, 46, 47, 48, 49, 50, 51, 52)
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53. A micro-fabricated device, comprising
a support structure having an aperture; -
a device substrate disposed in said aperture a distance G from said support structure; and
at least one thermally isolating structure comprising;
a thermal conduction path greater than said distance G, and a folded structure having;
a first section, a second section, and a folding section, wherein said second section is folded back and substantially parallel to said first section, whereby a U shaped structure is formed, wherein said at least one thermally isolating structure thermally couples to said device substrate and said support structure.
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54. A method of manufacturing a micro-fabricated device, comprising:
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forming a support structure;
defining a device substrate disposed a distance G from said support structure; and
forming at least one thermally isolating structure, having a characteristic length greater than said distance G, and thermally coupled to said device substrate and said support structure. - View Dependent Claims (55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79)
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80. A method of manufacturing a micro-fabricated device, comprising:
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forming a support structure;
defining a device substrate disposed a distance G from said support structure; and
forming at least one thermally isolating structure, having a folded section and a first section, substantially parallel to a second section, said folded section interposed between said first and said second sections, wherein said at least one thermally isolating structure has a characteristic length greater than said distance G, and thermally coupled to said device substrate and said support structure.
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Specification