Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination

• US 20040149699A1
• Filed: 01/08/2004
• Published: 08/05/2004
• Est. Priority Date: 03/17/2000
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Sun, Jennifer Y., Ye, Yan, Thach, Senh, Hofman, Daniel J.
• Granted Patent: US 7,220,937 B2
• Time in Patent Office: Days
• US Class Current: 219/121.43
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32183 Matching circuits

Abstract

A gas distribution ceiling electrode for use as a capacitive source power applicator and gas distribution showerhead in a plasma reactor includes a metal base and a process-compatible protective layer on the interior surface of he electrode having a dopant impurity concentration within a range corresponding to a minimal change in RF power absorption in the protective layer at an RF source power frequency with changes in coating temperature and or thickness. The metal base may have a set of first arcuately slotted gas passages and a set of pressure-dropping orifices coinciding axially with the top ends of the gas passages. The protective coating a set of arcuately slotted gas passages in registration gas passages of the metal base. The pressure drop in the orifices and the electric field drop in the slotted gas passages are both sufficient to maintain the pressure and electric field within the gas passages within a range that prevents arcing.

Claims

1. A gas distribution ceiling electrode, comprising:

(A) a metal base comprising;

a gas manifold near the top of said base,

a plurality of first arcuately slotted gas passages, each passage having a starting end inside said base, each passage extending axially from said starting end to the bottom of said base,

a plurality of radially extending pressure-dropping orifices coupled between said gas manifold and the starting ends of said first arcuately slotted gas passages;

(B) a protective layer formed of a process-compatible material at the bottom of said base, and comprising;

a plurality of second arcuately slotted gas passages extending through said protective layer and being in registration with said plurality of first arcuately slotted gas passages;

(C) plural adhesive islands between said metal base and said protective layer.

2. The apparatus of claim 1 wherein said first and second arcuately slotted gas passages have a slot length sufficient to minimize pressure changes therein to less than half of a pressure difference between said manifold and the bottom of said ceiling electrode.

3. The apparatus of claim 2 wherein said first and second arcuately slotted gas passages have a slot width sufficiently narrow to produce an electric field drop along the combined lengths of said first and second arcuately slotted gas passages in excess of half of an electric field difference between the top and bottom of said electrode.

4. The apparatus of claim 3 wherein said each of said orifices has a diameter sufficiently small to produce a pressure drop along a length of each orifice in excess of half a pressure difference between said manifold and the bottom of said ceiling electrode.

5. The apparatus of claim 1 wherein said first and second arcuately slotted gas passages have a slot length on the order of about 0.070 inch and a slot width on the order of about 0.010 inch, and wherein each of said orifices has a diameter on the order of about 0.010 inch.

6. The apparatus of claim 4 wherein each orifice extends perpendicularly to the lengths of said first and second arcuately slotted gas passages, whereby to minimize an electric field drop along the length of each orifice.

7. The apparatus of claim 1 wherein each of said first arcuately slotted gas passages comprises an annular slot.

8. The apparatus of claim 7 wherein each of said second arcuately slotted gas passages comprises a pair of slots corresponding to opposing arcs of a circle.

9. The apparatus of claim 4 wherein:

the diameter of said orifices is sufficiently small to produce a pressure drop along the length of each orifice of at least 80% of said pressure difference, and

said slot width is sufficiently small to produce an electric field drop along the combined length of said first and second arcuately slotted gas passages of at least 80% of said electric field difference.

10. The apparatus of claim 1 wherein said process-compatible material of said protective layer is a semiconductor material.

11. The apparatus of claim 10 wherein said semiconductor material is silicon carbide.

12. The apparatus of claim 1 wherein the bottom of said base comprises plural recesses surrounded by respective lips, said plural adhesive islands nesting within respective ones of said plural recesses so as to be at least partially covered by said lips.

13. The apparatus of claim 12 further comprising plural spacers between said base and said protective layer and having an axial length defining a thickness of said plural adhesive islands.

14. The apparatus of claim 13 wherein said thickness is sufficient for a bond of optimum strength in said plural adhesive islands.

15. The apparatus of claim 14 wherein said plural adhesive islands are thin layers of a low-volatility adhesive bonding material.

16. The apparatus of claim 1 wherein said metal base comprises:

a top plate having plural axially extending posts;

a bottom plate having plural holes in which said posts are nested to define said first arcuately slotted gas passages;

a plurality of receptacles extending axially through said top plate and partially into said bottom plate;

a plurality of plugs press-fitted into respective ones of said receptacles so as to bind said top and bottom plates together.

17. The apparatus of claim 16 wherein each of said plugs comprises:

a central axial aperture extending from said gas manifold to an axial height of the starting ends of said first arcuately slotted gas passages;

said pressure-dropping orifices comprising a plurality of radial holes within each plug, said radial holes extending from said central aperture to the starting ends of respective ones of said first plurality of arcuately slotted gas passages.

18. The apparatus of claim 17 wherein each of said plugs is located symmetrically with respect to a set of said first plurality of arcuately slotted gas passages.

19. The apparatus of claim 1 further comprising a temperature controlling chill plate and a temperature controlling heating plate, said chill plate and said heating plate being stacked axially over said metal base and being in thermal contact with said metal base.

20. The apparatus of claim 17 wherein each of said radial holes have a sufficiently small diameter to produce a pressure drop along the length thereof in excess of half a pressure difference between said manifold and the bottom of said ceiling electrode, while said first and second pluralities of arcuately slotted gas passages have a slot length sufficient to minimize a pressure drop therein to less than half said pressure difference.

21. The apparatus of claim 20 wherein said pressure drop in said holes is at least 80% of said pressure difference.

22. The apparatus of claim 1 wherein said protective layer comprises a semiconductor layer with a dopant impurity concentration corresponding to a loss tangent in a region of minimum change in VHF power absorption with respect to change in at least one of:

(a) temperature of said protective layer, (b) temperature of said protective layer, and (c) dopant impurity concentration.

23. The apparatus of claim 22 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not less than about 10 at a VHF frequency.

24. The apparatus of claim 23 wherein said silicon-containing semiconductor material is silicon carbide.

25. The apparatus of claim 22 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not greater than about 0.1 at a VHF frequency.

26. The apparatus of claim 25 wherein said silicon-containing semiconductor material is silicon carbide.

27. The apparatus of claim 1 wherein said protective layer comprises a semiconductor material with a dopant impurity concentration within a range corresponding to a minimal change in RF power absorption with respect to a change in (a) temperature of said protective layer, (b) thickness of said protective layer, and (c) dopant impurity concentration in said protective layer.

28. The apparatus of claim 22 wherein said range corresponds to a minimal change in RF power absorption in said protective layer with respect to both (a) the temperature of said protective layer and (b) the thickness of said protective layer.

29. The apparatus of claim 1 wherein said bonding adhesive layer comprises an adhesive material cured at an intermediate temperature between an ambient temperature and an elevated bakeout temperature.

30. The apparatus of claim 29 wherein said intermediate temperature is at least near a plasma process operating temperature of said gas distribution electrode.

31. The apparatus of claim 1 wherein said bonding adhesive layer comprises an adhesive material (a) cured at a curing temperature lying between an ambient temperature and a bakeout temperature and (b) purged at said bakeout temperature.

32. A gas distribution ceiling electrode for use as a capacitive source power applicator and gas distribution showerhead in a plasma reactor, comprising:

a metal base;

a protective layer formed of a process-compatible material at the bottom of said base;

said process-compatible material having a dopant impurity concentration within a range corresponding to a minimal change in RF power absorption with respect to a change in at least one of;

(a) temperature of said protective layer, (b) thickness of said protective layer, (c) dopant impurity concentration in said protective layer.

33. The apparatus of claim 32 wherein said base comprises:

a gas manifold near the top of said base,

a first plurality of internal gas distribution passages, each said passage having a starting end coupled to said gas manifold, each said passage extending to the bottom of said base.

34. The apparatus of claim 33 wherein said protective layer comprises:

a second plurality of internal gas distribution passages extending through said protective layer and being in communication with said first plurality of internal gas distribution passages, said first and second pluralities of internal gas distribution passages being non-reentrant and extending through the thickness of said ceiling electrode.

35. The apparatus of claim 32 wherein said dopant impurity concentration corresponds to a loss tangent in a region of minimum change in VHF power absorption with respect to change in temperature of said protective layer.

36. The apparatus of claim 35 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not less than about 10 at a VHF frequency.

37. The apparatus of claim 36 wherein said silicon-containing semiconductor material is silicon carbide.

38. The apparatus of claim 35 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not greater than about 0.1 at a VHF frequency.

39. The apparatus of claim 38 wherein said silicon-containing semiconductor material is silicon carbide.

40. The apparatus of claim 32 wherein said range corresponds to a minimal change in RF power absorption in said protective layer with respect to both (a) the temperature and (b) the thickness of said protective layer.

41. A plasma reactor for processing a semiconductor workpiece, comprising:

a reactor chamber having a chamber wall and containing a workpiece support for holding the semiconductor workpiece;

an overhead electrode overlying said workpiece support;

an RF power generator for supplying power at a source power frequency to said overhead electrode, said generator being capable of maintaining a plasma within said chamber at a desired plasma ion density level;

said overhead electrode having a reactance that forms a resonance with the plasma at an electrode-plasma resonant frequency which is at or near said source power frequency at said desired plasma ion density level;

said overhead electrode comprising;

(a) a metal base;

(b) a protective layer formed of a process-compatible material at the bottom of said base;

(c) said process-compatible material having a dopant impurity concentration within a range corresponding to a minimal change in RF power absorption at said source power frequency with respect to a change in at least one of;

(a) temperature of said protective layer, (b) thickness of said protective layer, (c) dopant impurity concentration in said protective layer.

42. The apparatus of claim 41 wherein said dopant impurity concentration corresponds to a loss tangent in a region of minimum change in RF power absorption at said source power frequency with respect to change in temperature.

43. The apparatus of claim 42 wherein said silicon-containing semiconductor material is silicon carbide.

44. The apparatus of claim 42 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not less than about 10 at said source power frequency.

45. The apparatus of claim 42 wherein said protective layer comprises a silicon-containing semiconductor material, and said dopant impurity concentration corresponds to a loss tangent not greater than about 0.1 at said source power frequency.

46. The reactor of claim 41 wherein said plasma has a reactance and the reactance of said electrode corresponds to the reactance of said plasma.

47. The reactor of claim 46 wherein the reactance of said electrode is a conjugate of the reactance of said plasma.

48. The reactor of claim 46 wherein the reactance of said plasma comprises a negative capacitance, and wherein the capacitance of said electrode is the same magnitude as the magnitude of said negative capacitance of said plasma.

49. The reactor of claim 41 wherein said source power frequency and the electrode-plasma resonant frequency are VHF frequencies.

50. The reactor of claim 41 further comprising a fixed impedance matching element connected between said generator and said overhead electrode, said fixed impedance match element having a match element resonant frequency at least near said electrode-plasma resonant frequency.

51. The reactor of claim 50 wherein the match element resonant frequency and said electrode-plasma resonant frequency are offset from one another and said source power frequency lies between said electrode-plasma resonant frequency and said match element resonant frequency.

52. The reactor of claim 51 wherein said source power frequency, said plasma frequency and said match element resonant frequency are all VHF frequencies.

53. The reactor of claim 50 wherein said fixed impedance match element comprises:

a coaxial stub having a near end thereof adjacent said overhead electrode for coupling power from said RF power generator to said overhead electrode and providing an impedance transformation therebetween, said coaxial stub comprising;

an inner conductor connected at said near end to said overhead electrode,

an outer conductor around and spaced from said inner conductor and connected at said near end to an RF return potential of said RF power generator,

a tap at a selected location along the axial length of said stub, said tap comprising a connection between said inner conductor and an output terminal of said RF power generator.

54. The reactor of claim 53 wherein said selected location is a location along the length of said stub at which a ratio between a standing wave voltage and a standing wave current in said stub is at least nearly equal to an output impedance of said RF power generator.