Material sensing sensor and module using thin film bulk acoustic resonator
First Claim
1. A material sensing sensor using a thin film bulk acoustic resonator (TFBAR) comprising:
- a first thin film bulk acoustic resonator for generating a first resonant frequency according to the amount and/or thickness of a target material; and
a reference thin film bulk acoustic resonator for generating a reference resonant frequency.
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Abstract
A material sensing sensor using a thin film bulk acoustic resonator having a compact size and a high material measurement sensitivity is formed together with other material sensing sensors in an array form, and integrated with a signal processor on the same board, to thereby precisely sensing a plurality of materials, and a material sensing module. The material sensing sensor using a thin film bulk acoustic resonator (TFBAR) includes: a first thin film bulk acoustic resonator for generating a first resonant frequency according to the amount and/or thickness of a target material; and a reference thin film bulk acoustic resonator for generating a reference resonant frequency.
110 Citations
24 Claims
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1. A material sensing sensor using a thin film bulk acoustic resonator (TFBAR) comprising:
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a first thin film bulk acoustic resonator for generating a first resonant frequency according to the amount and/or thickness of a target material; and
a reference thin film bulk acoustic resonator for generating a reference resonant frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A material sensing module using a thin film bulk acoustic resonator (TFBAR) comprising:
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a sensor chip including a plurality of material sensing sensors each having a thin film bulk acoustic resonator generating a measurement resonant frequency according to the amount and/or thickness of a target material and a reference thin film bulk acoustic resonator generating a reference resonant frequency; and
a signal processor for mixing the measurement resonant frequency and the reference resonant frequency and measuring the amount and/or thickness of the target material on the basis of a power value of the mixed signal. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification