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Variable spot size illuminators with enhanced homogeneity and parfocality

  • US 20040151008A1
  • Filed: 02/03/2003
  • Published: 08/05/2004
  • Est. Priority Date: 02/03/2003
  • Status: Abandoned Application
First Claim
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1. A variable spot size illuminator, comprising a) a first optical system for generating a homogeneous distribution of a selected radiation on an intermediate plane, b) a variable aperture disposed in said intermediate plane for selecting a portion of said homogenous distribution of radiation, and c) an objective optical system substantially fixedly positioned relative to said intermediate plane and optically coupled thereto so as to generate an image of said selected portion onto an illumination plane.

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