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Optical waveguide structure and method for fabricating the same

  • US 20040151463A1
  • Filed: 02/03/2003
  • Published: 08/05/2004
  • Est. Priority Date: 02/03/2003
  • Status: Active Grant
First Claim
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1. An optical waveguide structure comprising:

  • a monocrystalline substrate;

    an amorphous interface layer overlying said monocrystalline substrate;

    an accommodating buffer layer overlying said amorphous interface layer; and

    an optical waveguide layer overlying said accommodating buffer layer.

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