Optical waveguide structure and method for fabricating the same
First Claim
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1. An optical waveguide structure comprising:
- a monocrystalline substrate;
an amorphous interface layer overlying said monocrystalline substrate;
an accommodating buffer layer overlying said amorphous interface layer; and
an optical waveguide layer overlying said accommodating buffer layer.
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Abstract
An optical waveguide structure (10) is provided. The optical waveguide structure (10) has a monocrystalline substrate (12), an amorphous interface layer (14) overlying the monocrystalline substrate (12) and an accommodating buffer layer (16) overlying the amorphous interface layer (14). An optical waveguide layer (20) overlies the accommodating buffer layer (16).
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Citations
47 Claims
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1. An optical waveguide structure comprising:
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a monocrystalline substrate;
an amorphous interface layer overlying said monocrystalline substrate;
an accommodating buffer layer overlying said amorphous interface layer; and
an optical waveguide layer overlying said accommodating buffer layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for forming an optical waveguide structure, the method comprising the steps of:
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providing a monocrystalline substrate;
depositing a monocrystalline accommodating buffer layer overlying said monocrystalline substrate;
forming an amorphous interface layer between said monocrystalline substrate and said monocrystalline accommodating buffer layer; and
forming an optical waveguide layer overlying said accommodating buffer layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A method for forming an optical waveguide structure, the method comprising the steps of:
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providing a monocrystalline substrate;
depositing a monocrystalline accommodating buffer layer overlying said monocrystalline substrate;
forming an amorphous interface layer between said monocrystalline substrate and said monocrystalline accommodating buffer layer;
forming a cladding layer overlying said monocrystalline accommodating buffer layer;
forming a trench in said cladding layer; and
forming an optical waveguide layer within said trench. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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Specification