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Microfluidic device with thin-film electronic devices

  • US 20040151629A1
  • Filed: 01/31/2003
  • Published: 08/05/2004
  • Est. Priority Date: 01/31/2003
  • Status: Active Grant
First Claim
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1. A microfluidic device for analysis of a sample, comprising:

  • a substrate portion at least partially defining a chamber for receiving the sample, the substrate portion including a substrate having a surface, and a plurality of thin-film layers formed on the substrate adjacent the surface, the thin-film layers forming a plurality of electronic devices, each of at least two of the electronic devices being formed by a different set of the thin-film layers, the at least two electronic devices including

         1) a temperature control device for controlling the temperature of fluid in the chamber, and

         2) an other electronic device configured to sense or modify a property of fluid in the chamber.

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