Microfluidic device with thin-film electronic devices
First Claim
1. A microfluidic device for analysis of a sample, comprising:
- a substrate portion at least partially defining a chamber for receiving the sample, the substrate portion including a substrate having a surface, and a plurality of thin-film layers formed on the substrate adjacent the surface, the thin-film layers forming a plurality of electronic devices, each of at least two of the electronic devices being formed by a different set of the thin-film layers, the at least two electronic devices including
1) a temperature control device for controlling the temperature of fluid in the chamber, and
2) an other electronic device configured to sense or modify a property of fluid in the chamber.
1 Assignment
0 Petitions
Accused Products
Abstract
A microfluidic device for analysis of a sample. The microfluidic device includes a substrate portion that at least partially defines a chamber for receiving the sample. The substrate portion includes a substrate having a surface. The substrate portion also includes a plurality of thin-film layers formed on the substrate adjacent the surface. The thin-film layers form a plurality of electronic devices. Each of at least two of the electronic devices is formed by a different set of the thin-film layers. The at least two electronic devices may include 1) a temperature control device for controlling the temperature of fluid in the chamber, and 2) an other electronic device configured to sense or modify a property of fluid in the chamber.
297 Citations
38 Claims
-
1. A microfluidic device for analysis of a sample, comprising:
a substrate portion at least partially defining a chamber for receiving the sample, the substrate portion including a substrate having a surface, and a plurality of thin-film layers formed on the substrate adjacent the surface, the thin-film layers forming a plurality of electronic devices, each of at least two of the electronic devices being formed by a different set of the thin-film layers, the at least two electronic devices including
1) a temperature control device for controlling the temperature of fluid in the chamber, and
2) an other electronic device configured to sense or modify a property of fluid in the chamber.- View Dependent Claims (2, 3, 4, 5, 6)
-
7. A microfluidic device for analysis of a sample, comprising:
a substrate portion at least partially defining a compartment for holding fluid, the substrate portion including a substrate having a surface and defining a line that is generally normal to the surface, and a plurality of thin-film electronic devices formed on the substrate adjacent the surface, each of the electronic devices being configured to sense or modify a property of fluid in the compartment, at least two of the electronic devices being intersected by the line. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
-
17. A microfluidic device for analysis of a sample, comprising:
-
a substrate portion at least partially defining a compartment for holding fluid, the substrate portion including a substrate having a surface and defining a line extending generally normal to the surface, and a plurality of thin-film layers formed on the substrate adjacent the surface and defining a pair of electronic devices using a different set of the thin-film layers for each device of the pair, each electronic device being operable to sense or modify a property of the sample in the compartment, and wherein the line intersects the pair of electronic devices. - View Dependent Claims (18, 19, 20)
-
-
21. A method of making a microfluidic device for analyzing a sample, comprising:
-
forming a plurality of thin-film layers on a substrate adjacent a surface of the substrate, the thin-film layers forming a plurality of thin-film electronic devices, each of at least two of the electronic devices being formed from a different set of the thin-film layers; and
attaching a fluid barrier to the substrate to form a compartment for holding fluid, wherein each of the at least two electronic devices is configured to sense or modify a property of fluid in the compartment. - View Dependent Claims (22, 23, 24)
-
-
25. A method of using a microfluidic device to analyze a sample, comprising:
-
introducing the sample to a compartment; and
operating a plurality of distinct thin-film electronic devices so that each of the electronic devices senses or modifies a property of the sample in the compartment, the electronic devices being provided by a plurality of thin-film layers formed on a substrate, each of at least two of the electronic devices being provided by a different set of the thin-film layers. - View Dependent Claims (26, 27, 28)
-
-
29. A microfluidic device for analyzing a sample, comprising:
-
means for introducing the sample to a compartment; and
means for interacting with the sample in the compartment, such interacting means including at least two electronic devices provided by a plurality of thin-film layers formed on a substrate, each of the at least two electronic devices being provided by a different set of the thin-film layers. - View Dependent Claims (30, 31, 32, 33)
-
-
34. A microfluidic device for analysis of a sample, comprising:
-
a substrate portion at least partially defining a chamber having a plurality of regions for processing the sample, the substrate portion including a substrate having a surface, and a plurality of thin-film layers formed on the substrate adjacent the surface, the thin-film layers providing a plurality of temperature control devices for controlling the temperature of fluid in the chamber, the control devices including at least one temperature sensor and at least one heater adjacent each region of the chamber, each temperature control device being configured to be independently regulated to provide a different thermal zone for each region of the chamber. - View Dependent Claims (35, 36, 37, 38)
-
Specification