Polyvinyl acetal composition skinless roller brush
First Claim
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1. A cleaning device comprising a body made of porous polyvinyl acetal material having a uniform pore size throughout the material with over 90% of the pores ranging from about 7 microns to about 40 microns in diameter.
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Abstract
A semiconductor cleaning device having a substantially cylindrical roller body made of polyvinyl acetal with a smooth outer surface and uniform material porosity having a mean flow pore pressure ranging from about 0.30 PSI to about 0.35 PSI with 95% of its pores ranging from 7 to 40 microns in size and a wet flow rate ranging from about 80.0 L/min to about 7.0 L/min.
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Citations
19 Claims
- 1. A cleaning device comprising a body made of porous polyvinyl acetal material having a uniform pore size throughout the material with over 90% of the pores ranging from about 7 microns to about 40 microns in diameter.
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7. A cleaning device comprising a body made of porous polyvinyl acetal material having a bubble point pressure of about, 0.92 PSI.
- 10. A semiconductor cleaning device comprising a body made of porous polyvinyl acetal material with a cylindrical roller shape and a smooth outer surface, said material having a uniform pore size throughout with at least 90% of the pores ranging from about 7 microns to about 40 microns in diameter with a fluid flow through rate which does not distort the roller during the cleaning process.
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13. A semiconductor cleaning device comprising a body made of porous polyvinyl acetal material having at least 95% of its pores with a diameter under 40 microns.
- 16. A semiconductor cleaning device comprising a body made of porous polyvinyl acetal material having a uniform pore size throughout the material with at least 95% of the pores being less than 40 microns in diameter, said material having a mean flow pore diameter of about 20 microns.
- 18. A semiconductor cleaning device comprising a substantially cylindrical roller body made of polyvinyl acetal with a smooth outer surface and uniform material porosity having a mean flow pore pressure ranging from about 0.30 PSI to about 0.40 PSI with 90% of its pores ranging from 7 to 40 microns and wet flow rate using water as a medium ranging from about 9.0 L/min to 20.0 L/min
Specification