Vibrators and vibratory gyroscopes

• US 20040154395A1
• Filed: 02/02/2004
• Published: 08/12/2004
• Est. Priority Date: 02/05/2003
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: NGK Insulators Limited
• Inventors: Kikuchi, Takayuki, Osugi, Yukihisa
• Granted Patent: US 7,043,986 B2
• Time in Patent Office: Days
• US Class Current: 73/503.3
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

The object of the present invention is to improve the sensitivity of a vibrator having at least one bending vibration arm vibrating along a specified plane in bending mode, and a base portion provided at one end of the arm. A vibrator 20A has at least one bending vibration arms 14, 15 vibrating along a specified plane in bending mode, base portions 1 and 22 provided at one ends of the arms 14 and 15, respectively, and weight portions 9, 12 provided at the other ends of the arms 14 and 15, respectively. Grooves 5 and 6 are formed on one main face 33 and the other main face 34 substantially parallel with the specified plane of the bending vibration arms 14 and 15, respectively.

Claims

1. A vibrator comprising at least one bending vibration arm vibrating in bending mode along a specified plane and having one and the other ends and one and the other main faces substantially parallel with each other, a base portion provided at said one end of said bending vibration arm, and a weight portion provided at the other end of said bending vibration piece, wherein grooves are formed on said one and the other main faces, respectively.

2. The vibrator of claim 1, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer.

3. The vibrator of claim 1, wherein the end of said groove and said one end of said bending vibration arm is distant by a distance “

t”

of 5 percent or more of the width “

W”

of said bending vibration arm.

4. The vibrator of claim 2, wherein the end of said groove and said one end of said bending vibration arm is distant by a distance “

t”

of 5 percent or more of the width “

W”

of said bending vibration arm.

5. The vibrator of claim 1, wherein a through hole opening at said one main face and said the other main face is formed in said bending vibration arm, and wherein said through hole is communicated with said groove.

6. The vibrator of claim 5, wherein said through hole is communicated with one end of said groove.

7. The vibrator of claim 6, wherein a plurality of said through holes are formed, and wherein one of said through holes is communicated with said one end of said groove and the other of said through holes is communicated with said the other end of said groove.

8. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising the vibrator of claim 1, a driving means for exciting a driving vibration in said vibrator, and a detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

14. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising the vibrator of claim 8, a driving means for exciting a driving vibration in said vibrator, and a detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

9. A vibrator comprising at least one bending vibration arm vibrating in bending mode along a specified plane and having one and the other ends and one and the other main faces substantially parallel with each other, and a base portion provided at one end of said bending vibration arm, wherein grooves are formed on said one and the other main faces, respectively, and wherein a through hole is formed between said one main face and said the other main face and communicated with said grooves.

10. The vibrator of claim 9, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer.

11. The vibrator of claim 9, wherein said through hole is communicated with said groove at one end of said groove.

12. The vibrator of claim 11, wherein a plurality of said through holes are provided, and wherein one of said through holes is communicated with said one end of said groove and the other of said through holes is communicated with the other end of said groove.

13. The vibrator of claim 9, wherein said bending vibration arm comprises a weight portion at the tip end of said arm.

15. A vibrator comprising a first bending vibration arm vibrating in bending mode along a specified plane, a second bending vibration arm vibrating in bending mode along said specified plane, and a base portion provided between said first and second vibration arms, wherein said vibrator has one main face, and wherein a groove is continuously formed in said first vibration arm, said second vibration arm and said base portion on said one main face.

16. The vibrator of claim 15, wherein said vibrator has the other main face substantially parallel with said one main face, and wherein a groove is continuously formed in said first vibration arm, said second vibration arm and said base portion on said the other main face.

17. The vibrator of claim 16, wherein a through hole is provided in said first bending vibration arm and formed between said one and the other main faces, and wherein said through hole is communicated with said groove.

18. The vibrator of claim 17, wherein a through hole is provided in said second bending vibration arm and formed between said one and the other main faces, and wherein said through hole is communicated with said groove.

19. The vibrator of claim 15, wherein said first bending vibration arm comprises a weight portion at the tip end of said first bending vibration arm.

20. The vibrator of claim 19, wherein said second bending vibration arm comprises a weight portion at the tip end of said second bending vibration arm.

21. The vibrator of claim 15, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said first bending vibration arm.

22. The vibrator of claim 19, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said first bending vibration arm.

23. The vibrator of claim 15, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said second bending vibration arm.

24. The vibrator of claim 20, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said second bending vibration arm.

25. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising the vibrator of claim 15, a driving means for exciting a driving vibration in said vibrator, and a detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

26. A vibrator comprising a first bending vibration arm vibrating in bending mode along a specified plane, a second bending vibration arm vibrating in bending mode along said specified plane, and a base portion provided between said first and second vibration arms, wherein said vibrator has one main face, and wherein said first and second vibration arms are formed along a substantially straight line and a groove is continuously formed in said first bending vibration arm and said base portion on said one main face.

27. The vibrator of claim 26, wherein a groove is continuously formed in said second bending vibration arm and said base portion on said one main face.

28. The vibrator of claim 26, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said first bending vibration arm.

29. The vibrator of claim 27, wherein said groove comprises a tapered portion whose width is reduced as said base portion is nearer at least in said second bending vibration arm.

30. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising the vibrator of claim 26, a driving means for exciting a driving vibration in said vibrator, and a detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.