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Structure integrating gas support bearing and a planar electromagnetic drive and levitation system

  • US 20040155534A1
  • Filed: 02/07/2003
  • Published: 08/12/2004
  • Est. Priority Date: 02/07/2003
  • Status: Abandoned Application
First Claim
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1. A combination that creates a fluid bearing that maintains a stage frame spaced apart from a base frame, the combination comprising:

  • a pad assembly secured to one of the frames, the pad assembly including a porous region; and

    a bearing fluid source that directs a fluid into the pad assembly so that the fluid is released from the porous region to create the fluid bearing that maintains at least a portion of the stage frame apart from the base frame.

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