Electrostatic RF MEMS switches
First Claim
1. A micro switch, comprising:
- a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by hinge parts formed on either side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
a dielectric film formed on the conductive layer;
first and second electric conductors formed a predetermined distance above the dielectric film;
two lower electrodes formed on the movement region; and
two upper electrodes formed a predetermined distance above the two lower electrodes, the two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs in the lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors.
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Accused Products
Abstract
A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.
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Citations
30 Claims
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1. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by hinge parts formed on either side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
a dielectric film formed on the conductive layer;
first and second electric conductors formed a predetermined distance above the dielectric film;
two lower electrodes formed on the movement region; and
two upper electrodes formed a predetermined distance above the two lower electrodes, the two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs in the lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors. - View Dependent Claims (2, 3, 4, 5)
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6. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by a hinge part formed on one side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
a dielectric film formed on the conductive layer;
first and second electric conductors formed a predetermined distance above the dielectric film;
a lower electrode formed on the movement region; and
an upper electrode formed a predetermined distance above the lower electrode, the upper electrode causing the conductive layer and the dielectric film to move upwards when an electrostatic force occurs in the lower electrode, and capacitively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors. - View Dependent Claims (7, 8, 9, 10)
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11. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by a hinge part formed on one side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
a dielectric film formed on the conductive layer;
first and second electric conductors formed a predetermined distance above the dielectric film; and
a piezoelectric layer formed on the movement region, causing the conductive layer to move upwards by the supply of a predetermined voltage, and resistively coupled with the first and second electric conductors to allow an electric current to flow between the first and second electric conductors. - View Dependent Claims (12, 13, 14, 15)
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16. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by hinge parts formed on either side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
first and second electric conductors formed a predetermined distance above the conductive layer;
two lower electrodes formed on the movement region; and
two upper electrodes formed a predetermined distance above the lower electrodes, the upper electrodes causing the conductive layer to move upwards when an electrostatic force occurs between the upper electrodes and the lower electrodes, and resistively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors. - View Dependent Claims (17, 18, 19, 20)
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21. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by a hinge part formed on one side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
first and second electric conductors formed a predetermined distance above the conductive layer;
a lower electrode formed on the movement region; and
an upper electrode formed a predetermined distance above the movement region, causing the conductive layer to move upwards when an electrostatic force is occurred between the lower electrode, and resistively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors. - View Dependent Claims (22, 23, 24, 25)
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26. A micro switch, comprising:
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a substrate;
a dielectric layer formed on the substrate, the dielectric layer having a movement region formed of a predetermined portion of the dielectric layer that is capable of moving up and down by a hinge part formed on one side of the movement region;
a conductive layer formed on a predetermined portion of the movement region;
first and second electric conductors formed a predetermined distance above the conductive layer; and
a piezoelectric layer formed on the movement region, causing the conductive layer to move upwards by the supply of a predetermined voltage, and resistively coupled with the first and second electric conductors to allow a current signal to flow between the first and second electric conductors. - View Dependent Claims (27, 28, 29, 30)
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Specification