Method and apparatus for sensing a temperature along an optical path with a grating in semiconductor material

• US 20040156575A1
• Filed: 02/12/2003
• Published: 08/12/2004
• Est. Priority Date: 02/12/2003
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Alduino, Andrew C., Samara-Rubio, Dean A., Frost, Christina A.
• Granted Patent: US 6,853,759 B2
• Time in Patent Office: Days
• US Class Current: 385/12
• CPC Class Codes: G02B 2006/12107 Grating
• CPC Class Codes: G02B 2006/12135 Temperature control
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings

Abstract

A temperature sensing and control method and apparatus. In one aspect of the present invention, an apparatus according to the teachings of the present invention includes an optical path disposed in semiconductor material, a grating disposed in the optical path, and a thermal probe including an optical sensor optically coupled to the grating to sense a spectral response of the grating. The thermal probe is adapted to determine a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating.

Claims

1. An apparatus, comprising:

an optical path disposed in a material;

a grating disposed in the optical path; and

a thermal probe including an optical sensor optically coupled to the grating to sense a spectral response of the grating, the thermal probe to determine a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating.

2. The apparatus of claim 1 wherein the grating is a Bragg grating having a Bragg wavelength, wherein the spectral response is responsive to the Bragg wavelength

3. The apparatus of claim 1 wherein the spectral response includes a reflection spectral peak, the optical sensor optically coupled to receive an optical beam having the reflection spectral peak reflected from the grating.

4. The apparatus of claim 1 wherein the spectral response includes a transmission spectral valley, the optical sensor optically coupled to receive an optical beam having the transmission spectral valley transmitted from the grating.

5. The apparatus of claim 1 wherein the grating is one of a plurality of gratings disposed in the optical path, wherein each of the plurality of gratings has a corresponding spectral response.

6. The apparatus of claim 5 wherein the optical beam includes a plurality of wavelengths corresponding to the plurality of gratings disposed in the optical path, wherein one of the plurality of wavelengths includes a probe wavelength to determine the temperature of the optical path.

7. The apparatus of claim 5 further comprising a heater coupled to the thermal probe and thermally coupled to the material to control the temperature of the optical path in which the plurality of gratings are disposed.

8. The apparatus of claim 7 wherein the corresponding spectral response of each of the plurality of gratings is responsive to the temperature of the optical path.

9. The apparatus of claim 1 further comprising an optical waveguide disposed in the material, wherein the optical path is included within the optical waveguide through the material.

10. The apparatus of claim 1 wherein the material comprises silicon.

11. A method, comprising:

directing an optical beam through an optical path disposed in a material from a grating disposed in the optical path;

sensing a spectral response of the grating in response to the optical beam directed from the grating; and

determining a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating.

12. The method of claim 11 wherein directing the optical beam through the optical path from the grating comprises directing the optical beam through the grating, wherein the spectral response includes a transmission spectral valley such that the optical beam directed from the grating has the transmission spectral valley.

13. The method of claim 11 wherein directing the optical beam through the optical path from the grating comprises reflecting at least a portion of the optical beam from the grating, wherein the spectral response includes a reflection spectral peak such that the optical beam directed from the grating has the reflection spectral peak.

14. The method of claim 11 wherein the spectral response of the grating is responsive to a Bragg wavelength of the grating.

15. The method of claim 14 further comprising tuning the Bragg wavelength of the grating in response to the temperature of the optical path in which the grating is disposed.

16. The method of claim 15 wherein tuning the Bragg wavelength of the grating comprises adjusting the temperature of the optical path in which the grating is disposed.

17. The method of claim 16 wherein adjusting the temperature of the optical path in which the grating is disposed comprises adjusting an amount of heat generated with a heater thermally coupled to the optical path.

18. The method of claim 11 wherein the optical beam includes a plurality of channels, each of which having a corresponding wavelength, the method further comprising reflecting at least a portion of one or more of the channels of the optical beam with a corresponding plurality of gratings disposed in the optical path, each of the plurality of gratings having corresponding Bragg wavelengths.

19. A system, comprising:

an optical transmitter to transmit an optical beam;

an optical device optically coupled to the optical transmitter to receive the optical beam, the optical device including

an optical path disposed in a material;

a grating disposed in the optical path; and

a thermal probe including an optical sensor optically coupled to the grating to sense a spectral response of the grating, the thermal probe to determine a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating; and

an optical receiver optically coupled to the optical device to receive at least a portion of the optical beam.

20. The system of claim 19 wherein the grating is a Bragg grating having a Bragg wavelength, wherein the spectral response is responsive to the Bragg wavelength

21. The system of claim 19 wherein the spectral response includes a reflection spectral peak, the optical sensor optically coupled to receive an optical beam having the reflection spectral peak reflected from the grating.

22. The system of claim 19 wherein the spectral response includes a transmission spectral valley, the optical sensor optically coupled to receive an optical beam having the transmission spectral valley transmitted from the grating.

23. The system of claim 19 wherein the grating is one of a plurality of gratings disposed in the optical path, wherein each of the plurality of gratings has a corresponding spectral response.

24. The system of claim 23 wherein the optical beam includes a plurality of wavelengths corresponding to the plurality of gratings disposed in the optical path, wherein one of the plurality of wavelengths includes a probe wavelength to determine the temperature of the optical path.

25. The system of claim 23 further comprising a heater coupled to the thermal probe and thermally coupled to the material to control the temperature of the optical path in which the plurality of gratings are disposed.

26. The system of claim 25 wherein the corresponding spectral response of each of the plurality of gratings is responsive to the temperature of the optical path.

27. The system of claim 19 further comprising an optical waveguide disposed in the material, wherein the optical path is included within the optical waveguide through the material.

28. The system of claim 19 wherein the material comprises silicon.