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Method and apparatus for sensing a temperature along an optical path with a grating in semiconductor material

  • US 20040156575A1
  • Filed: 02/12/2003
  • Published: 08/12/2004
  • Est. Priority Date: 02/12/2003
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • an optical path disposed in a material;

    a grating disposed in the optical path; and

    a thermal probe including an optical sensor optically coupled to the grating to sense a spectral response of the grating, the thermal probe to determine a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating.

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